New M - 500 Generation of Translation Stages

Fig. 1, M-511, M-521, M-531, Translation Stages
 Travel to 12" (306 mm)
 Velocity to 200 mm/s
 Direct Output Metrology: 01µ Resolution
 Zero-Backslash, Recirulating Ball-Screw
 Active Motor Drive (integrated DC-Servo-amlifier)
 Stress-Relieved Aluminium Stage Base for
   Highest Stablity
 Non-contacting home- and limit switches
  Optional motor break

The introduction of PI's new M-500 genera- tion at LASER 99 in Munich was a great success. Small wonder, considering all the improvements over the predecessor (M-5x5 Series) at lower cost.


Fig. 2, Interferometer Test Sheet

Improvements
1. Integrated linear encoders (direct output metro-logy) are now standard in all DC direct drive versions. The stage position is measured by a non-contacting read head directly at the moving platform, providing improved resolution (0.1 µm) and repeatability (0.2 µm) close to one order of magnitude over the previous models.

2. The last generation M-500 stages required an external power amplifier between the motor controller and the stage. With the new generation, we shrunk the amplifier and installed it inside the stage (Active Drive). Why? No power loss, higher dynamics, less cables, lower costs. Now, one C-842 PC-Motor Controller Board is sufficient to drive 4 fast stages.

3. High velocity and resolution are available at the same time: 50 mm/sec and 0.1 µm. Velocity of 200 mm/sec can be achieved at 0.5 µm resolution.
4. Travel ranges were increased from 100, 200 and 300 mm, to 102, 204 and 306 mm (4", 8", 12").

5. Double limit switches provide improved protection from overtravel and damage.

6. Integrated non-contacting, Hall-effect origin switches with left/right-of-switch position-detection allow fast and precise homing procedures, a time saving feature in industrial applications.


7. An optional motor brake locks the stage in case of power loss or whenever a position has to be maintained without drive power to the motor. All these benefits are available under the following part numbers: M-511.DD (102 mm), M-521.DD (204 mm) and M-531.DD (306 mm). Need more details?