 Fig. 1, M-511, M-521, M-531, Translation Stages |
Travel to 12" (306 mm)
Velocity to 200 mm/s
Direct Output Metrology: 01µ Resolution
Zero-Backslash, Recirulating Ball-Screw
Active Motor Drive (integrated DC-Servo-amlifier)
Stress-Relieved Aluminium Stage Base for Highest Stablity
Non-contacting home- and limit switches
Optional motor break
The introduction of PI's new M-500 genera- tion at LASER 99 in Munich was a great success. Small wonder, considering all the improvements over the predecessor (M-5x5 Series) at lower cost. |
 Fig. 2, Interferometer Test Sheet |
Improvements
1. Integrated linear encoders (direct output metro-logy)
are now standard in all DC direct drive versions. The stage position
is measured by a non-contacting read head directly at the moving
platform, providing improved resolution (0.1 µm) and repeatability
(0.2 µm) close to one order of magnitude over the previous models.
2. The last generation M-500 stages required
an external power amplifier between the motor controller and the
stage. With the new generation, we shrunk the amplifier and installed
it inside the stage (Active Drive). Why? No power loss, higher
dynamics, less cables, lower costs. Now, one C-842 PC-Motor Controller
Board is sufficient to drive 4 fast stages.
3. High velocity and resolution are available at the same time:
50 mm/sec and 0.1 µm. Velocity of 200 mm/sec can be achieved at
0.5 µm resolution.
4. Travel ranges were increased from 100, 200 and 300 mm, to 102,
204 and 306 mm (4", 8", 12").
5. Double limit switches provide improved protection from overtravel
and damage.
6. Integrated non-contacting, Hall-effect origin switches with
left/right-of-switch position-detection allow fast and precise
homing procedures, a time saving feature in industrial applications.
7. An optional motor brake locks the stage in case of power loss
or whenever a position has to be maintained without drive power
to the motor. All these benefits are available under the following
part numbers: M-511.DD (102 mm), M-521.DD (204 mm) and M-531.DD
(306 mm). Need more details? |