Sub-Nanometer Resolution
Capacitive Position Sensors/Electronics

Click here for Capacitance Sensors Selection Guide

• Highest resolution (‹0.01 nanometer) of commercially available position sensors.
• Measuring range: up to 1000 µm.
• Linearity up to 0.01%
• Extremely high long-term stability (£ 0.1 nm/3 hours).
• Up to 10 kHz bandwidth.
• Invar versions for highest temperature stability (5x10_-6/°K).
• Stand-alone and modular electronics.
• Electronics for position servo control with PI piezo actuators/systems.