Micropositioners
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Click here for Micropositioner Selection Guide
Application Examples: Micropositioning, Semiconductor Positioning, Laser & Electro-Optics Manipulation, Micro-Machining, Micro-Mechanics.
- Manually driven linear stages with 6, 15, 18, 25, 50, and 100 mm travel. Resolution is typically 1 µm. Optional piezo drives with 10 nm resolution are available for the 6 through 25 mm models.
- Motorized linear stages with 15, 25, 50, 100, 150, 200 and 300 mm travel. Ultra-High Resolution Velocity ranges from 0.01 mm/sec (options for even lower minimum velocity are available) to 100 mm/sec. Load capacity ranges from 4 kg to 100 kg (220 lb.). Guidance accuracy from 0.2 µm to 2 µm.
- Ultra-compact motorized stages for photonic alignment.
- Hexapod 6 DoF MicroMotion Robots
- Manually and motor-driven rotation and tilt stages. Resolution 0.001 degrees, velocity up to 45 degrees/sec, load capacity up to 40 kg (88 lb.). Optional piezo drives with sub arc-second resolution.
- All linear and rotary positioners can be arranged to multi axis combinations.
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