Piezo Flexure NanoPositioners and Scanners

Click here for Piezo NanoPositioner Selection Guide

Application examples: Metrology, Disk Drive and MR Head Testing, Nanopositioning, Semiconductor Test Equipment, Lithography, Wafer Steppers, Mask Alignment, Precision Machining (Out-Of-Roundness Turning, Boring, Grinding), Scanning Interferometry, Surface Structure Analysis, Scanning Microscopy, Autofocus Systems, Bio-Technology

• Complete solutions for NanoAutomation tasks.
• Closed loop operation for highest accuracy, linearity and repeatability.
• Integrated capacitive position sensors for sub-nanometer resolution.
• Optimized mechanical design, control algorithms and software for highest throughput.
• Wire EDM (Electric Discharge Machining) cut flexures for zero stiction/friction.
• Finite Element Analysis (FEA) computer designed flexures for nm and microradian trajectory control.
• Optional active trajectory control for sub-nm sub-microradian straightness and flatness.
• Invar, titanium, steel and aluminum versions for optimized thermal match.
• Single and multi-axis systems with large aperture.
• For positioning and scanning: step response in low millisecond range.
• Standard, custom and OEM control electronics (digital and analog controllers, rack mount and modular systems, compatibility with advanced feed-forward techniques), software.
• OEM and custom designs.