Click here for new Piezoelectric Motor Selection Guide
N-110 NEXLINE® Miniature High-Load Piezoelectric Linear Nanopositioning Drive
The novel, patented NEXLINE® linear motor drive design combines long travel ranges (hundreds of millimeters) with high stiffness and high resolution (better than 0.1 nm). Coordinated motion of shear and longitudinal Piezoelectric elements is what allows NEXLINE®to break away from the limitations of conventional Nanopositioning actuators. NEXLINE® motion is possible in two different modes: a high-resolution, high dynamics analog mode, and a step mode with theoretically unlimited travel range.
NEXLINE® OEM Drives Offer Complete Flexibility
High-Resolution Dynamic Operation Basically Unlimited Travel Range Unlimited Lifetime
Application examples:
NEXLINE® drives can be used wherever high loads must be positioned with very high precision and optional small, dynamic adjustments such as active vibration control. By fine-tuning the combination of shear and longitudinal actuator motion, the incremental motion (analog-mode travel range), holding force and stiffness can be controlled directly. In NEXLINE® OEM drives, the clamping and shear elements press against a slider, which is appropriately
linked to the moving part of the application. If the application does not pro-vide its own position signal, the NEXLINE® drives can be equipped with internal position sensors, like, for example high-resolution capacitive or incremental sensors.
In the analog mode, motion is provided by the high-stiffness shear Piezoelectric elements. The resonant frequency in the direction of motion is as high as 2 kHz. The settling-time in analog mode is typically less than 10 ms. The position resolution is basically unlimited and in a closed-loop system only depends on the sensor.
Step mode is effectuated with a sequence of shear and clamping motions. The step frequency can reach 100 Hz and, depending on the step size, speeds of up to 0.5 mm/s can be achieved.
NEXLINE® actuators can often be found in inaccessible locations deep inside complex equipment, where nanometer-precise alignment and vibration-cancelation are required. This makes long lifetime for NEXLINE® piezo linear motor drives an absolute necessity. The drive can always be brought to a condition with zero-voltage on the individual Piezoelectric elements and with the full holding force available, no matter where it is along its travel range. This eliminates long-term offset voltages, which limit the lifetime of piezo transducers.
Metrology, Semiconductor manufacturing, Quality control in the semiconductor industry, Beamline-/cavity tuning, Alignment in high magnetic fields
, etc.