Click here for new Piezoelectric Nanopositioning Sytems Selection Guide
P-287 Open-Loop Piezoelectric Z/Tilt Flexure Stage
P-287 positioners are high-resolution, piezoelectrically-driven flexure stages providing tilt-ranges up to 12 mrad and vertical travel up to 700 µm. A ball seat is machined into the tip to decouple rotation if the P-287 is used as a linear drive (for other flexure guided OEM actuators, see the P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator). In that case an external guiding system is recommended (e.g. frictionless diaphragm spring).
Working Principle
Application examples:
P-287 piezoelectric positioners are equipped with PICA piezoceramic translators integrated into a zero stiction/friction, ultra-high-resolution, wire-EDM-cut flexure motion amplifier system. The linear motion of the integrated piezo translator produces an arc motion of the tip.
Nanopositioning, Wafer inspection, Medical analysis, Biotechnology, Optics, etc.