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P-290 Long-Travel Piezoelectric Nanopositioning Flexure Z-Stage
The P-290 is a piezoelectrically driven Z- stage providing 1 mm vertical displacement. It is designed for high-resolution static and low-frequency dynamic positioning applications.
For closed-loop flexure guided OEM actuators, see the P-601 PiezoMoveŽ High-Precision Lever Amplified Z-Actuator).
Working Principle
Application examples:
The P-290 vertical positioning platform is driven by a piezoelectric actuator system consisting of of two stacked piezo flexure tilt positioners (similar to P-287 Piezoelectric Z/Tilt Flexure Stage) machined from one solid piece of stainless steel. Each of the two tilt positioners is equipped with one PICA piezoelectric stack actuator integrated into a wire-EDM-cut flexure motion amplifier system. The positioning platform is guided by additional linear ball bearings to eliminate tilt.
Wafer inspection, Nanopositioning, Medical analysis, Biotechnology, Optics, etc.