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P-753 LISA Piezoelectric NanoAutomation® Stages / Actuators with Direct Metrology
P-753 LISA (Linear Stage Actuators) high-speed nanopositioners can be employed both as linear actuators or as precision nanopositioning translation stages. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezoelectric drives providing a positioning and scanning range of up to 38 µm with very fast settling time and extremely good straightness of travel.
NanoAutomation® : Achieve Nanometer Precision in Milliseconds
Interchangeability: Auto-Calibration with ID-Chip Long Lifetime
Application Examples:
The direct-drive design, together with careful attention to mass minimization, results in significant reduction in inertial recoil forces, enhancing overall system response, throughput and stability with settling times in the millisecond range.
Furthermore our new digital control electronics with DDL (Dynamic Digital Linearization) can be used to increase linearity and effective bandwidth in scanning applications by up to 1000-fold.
For optimized operation and interchangeability of nanomechanisms and controllers, models P-753.xCD are equipped with an ID-chip which holds all calibration data and sends it to the digital controller (e.g. E-750.CP). Models P-753.xxC can be used with either analog or digital controllers.
P-753 stages are equipped with the award winning PICMA® Piezoelectric drives, integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® drives are more robust than conventional Piezoelectric actuators, featuring superior lifetime and performance in both dynamic and static applications.
Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
Disk drive testing, FBG writing (fiber bragg gratings), Metrology, Nanopositioning, Scanning microscopy, Photonics, Scanning interferometry, Biotechnology, Micromanipulation, etc.