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P-783 Piezo Z-Stage / Actuator with Direct Metrology
Compact, Yet Long Travel Range
P-783 Z-stages feature direct-measuring, non-contact LVDT sensors (direct metrology).
Unlike indirect sensors, direct-metrology sensors measure the actual distance between the fixed frame and the moving part of the stage. This results in higher motion linearity, long-term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster-responding servo-loop.
Working Principle
Application Examples:
The P-783 piezoelectric positioner is a compact, closed-loop actuator providing a scanning and positioning range of 300 µm. It is designed for applications with small loads ranging from a few grams to a few hundred grams. (For longer travel ranges see the P-601 PiezoMove® flexure guided OEM actuators).
P-783 piezoelectric nanopositioning stages are equipped with the award winning PICMA® drives, integrated into a flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® actuators are more robust than conventional piezoelectric actuators, featuring superior lifetime and performance in both dynamic and static applications.
Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
Metrology, Wafer inspection, PCB inspection, Nanopositioning, Switching, Biotechnology, Micromanipulation, etc.