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D-015 • D-050 • D-100 Capacitive Sensors

Sub-Nanometer-Resolution Position Sensors

PI D-015
    • For applications requiring highest precision
    • Measurement range to 1000 µm
    • Resolution to 0.01 nm
    • Linearity error to 0.01 % with digital controller
    • Bandwidth to 10 kHz
    • Servo controller E-509.CxA, compatible with E-500 piezo controller system
    • Custom designs

Specifications

D-015.00

D-050.00

D-100.00

Unit

Sensor

Sensor type

Capacitive

Capacitive

Capacitive

Nominal measurement range

15

50

100

µm

Extended measurement range

45

150

300

µm

Resolution*

0.0005

0.0005

0.0005

% of measurement range

Linearity error**

0.01

0.01

0.01

%

Sensor active area

16.6

56.5

113.1

mm²

Thermal drift***

50

50

50

ppm/K

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Recommended sensor electronics

E-509.CxA

E-509.CxA

E-509.CxA

Ask for custom materials.

Drawings / Images

PI D-015 Drawing PI D-050 Drawing PI D-100 Drawing PI D-015 Diagramm

Order Information

D-015.00Capacitive 2-Plate Position Sensor, 15 µm, Aluminum

D-050.00Capacitive 2-Plate Position Sensor, 50 µm, Aluminum

D-100.00Capacitive 2-Plate Position Sensor, 100 µm, Aluminum


Ask about custom designs!

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Controllers / Drivers / Amplifiers

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ106E
D-015, D-050, D-100 Capacitive Sensors
PDF 228 K 2.2.0 EN
fileadmin/images/filelist/pdf.png PI Datasheet D-015 • D-050 • D-100
Capacitive Sensors Sub-Nanometer-Resolution Position Sensors
PDF 929 K