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E-509 Signal Conditioner / Piezo Servo Module

3-Channel Sensor Module with / without Servo-Controller, for E-500 System

PI E-509
    • Position control for piezo positioning systems with SGS and capacitive sensors
    • 1-, 2- and 3-channel versions
    • Improves Linearity error
    • Eliminates drift and hysteresis
    • Notch filter for higher bandwidth
    • Increases piezo stiffness
    • ILS circuitry maximizes capacitive sensor linearity
    • Module for E-500 piezo controller rack
    • Computer interface and display modules

Specifications

E-509.C1A / E-509.C2A / E-509.C3A

E-509.S1 / E-509.S3

Function

Sensor / position servo-control modules for piezo-driven systems

Sensor / position servo-control modules for piezo-driven systems

Channels

1 / 2 / 3

1 / 3

Sensor

Servo characteristics

P-I (analog), notch filter

P-I (analog), notch filter

Sensor type

Capacitive

SGS

Sensor channels

1 / 2 /3

1 / 3

Sensor bandwidth

0.3 to 3 kHz (jumper selectable); to 10 kHz on request

0.3; 1; 3 kHz

Noise factor

0.115 ppm/√Hz

-

Thermal drift

<0.3 mV/°C

<3 mV/°C

Linearity error

<0.05 %

<0.2 %

Interface and operation

Sensor connection

LEMO EPL.00.250.NTD

LEMO ERA.0S.304.CLL

Sensor monitor output

0 – 10 V

0 – 10 V

Sensor monitor socket

LEMO 6-pin FGG.0B.306.CLAD56

BNC (1-ch.) / 3-pin LEMO (3-ch.)

Supported functionality

ILS

ILS

Display

Overflow LED

Overflow LED

Miscellaneous

Operating temperature range

5 to 50 °C

5 to 50 °C

Dimensions

7HP/3RU

7HP/3RU

Mass

0.35 kg

0.35 kg

Operating voltage

E-500 System

E-500 System

Max. power consumption

4 to 8 W

4 to 8 W

Order Information

E-509.C1ASensor / Piezo Servo-Control Module, Capacitive Sensor, 1 Channel

E-509.C2ASensor / Piezo Servo-Control Module, Capacitive Sensors, 2 Channels

E-509.C3ASensor / Piezo Servo-Control Module, Capacitive Sensors, 3 Channels

E-509 .S1Sensor / Piezo Servo-Control Module, SGS Sensor, 1 Channel

E-509.S3Sensor / Piezo Servo-Control Module, SGS Sensors, 3 Channels


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Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png PI Datasheet E-509
Signal Conditioner / Piezo Servo Module 3-Channel Sensor Module with / without Servo-Controller, for E-500 System
PDF 703 K
fileadmin/images/filelist/pdf.png User Manual PZ77E
E-509 Sensor / Piezo Servo-Control Module
PDF 1 M 2.8.4 EN
fileadmin/images/filelist/pdf.png User Manual PZ62E
E-500 / E-501 Series Modular Piezo Controller: Chassis with power supply, amplifier modules (E-503, E-504, E-505, E-506, E-508), sensor and servo-control module (E-509), display and interface modules (E-515, E-517).
PDF 1.6 M 2.15.1 EN