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H-810 6-Axis Miniature Hexapod

High Precision in a Small Package

H-810
    • Most compact standard Hexapod in the PI portfolio
    • Travel ranges to 40 mm / 60°
    • Load capacity to 5 kg
    • Actuator resolution 40 nm
    • Min. incremental motion to 0.5 µm
    • Repeatability to ±0.1 µm
    • Velocity to 2.5 mm/s
    • Works in any orientation
    • Sophisticated controller using vector algorithms, virtual pivot point
    • Extensive software support

Reference-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction

Direct drive with brushless DC motors (BLDC) and long-life ball screws

High precision, velocity and lifetime

Powerful digital controller, open software architecture

User-defined, stable pivot point, software-selectable. Positions commanded in Cartesian coordinates. Macro programming. Open source LabVIEW driver set. Work space simulation software. Virtual Hexapod machine software. Optional: Collision avoidance software (external obstacles).
H-810.xx1 includes C-887.11, 6D vector motion controller plus 2 additional servo axes. Options:

  • Analog interfaces / photometer cards for visible light (F-206.VVU) or the infrared light range (F-206.iiU)
  • F-206.NCU fast piezo nano-alignment system for alignment with nanometer precision

H-810.xx2 includes C-887.21 compact 6D vector motion controller

Fields of application

Research and industry. For micromanipulation, laser and optics alignment, biotechnology, tool control

Specifications

H-810.D1x

Unit

Tolerance

Active axes

X, Y, Z, θX, θY, θZ

Motion and positioning

Travel range* X, Y

±20

mm

Travel range* Z

±6.5

mm

Travel range* θX, θY

±10

°

Travel range* θZ

±30

°

Single-actuator design resolution

40

nm

Min. incremental motion X, Y

1

µm

typ.

Min. incremental motion Z

0.5

µm

typ.

Min. incremental motion θX, θY, θZ

10

µrad

typ.

Backlash X, Y

3

µm

typ.

Backlash Z

0.5

µm

typ.

Backlash θX, θY

15

µrad

typ.

Backlash θZ

75

µrad

typ.

Repeatability X, Y

±1

µm

typ.

Repeatability Z

±0.1

µm

typ.

Repeatability θX, θY

±3

µrad

typ.

Repeatability θZ

±15

µrad

typ.

Velocity X, Y, Z

2.5

mm/s

max.

Velocity θX, θY, θZ

60

mrad/s

max.

Velocity X, Y, Z

2

mm/s

typ.

Velocity θX, θY, θZ

30

mrad/s

typ.

Mechanical properties

Stiffness X, Y

0.1

N/µm

Stiffness Z

4

N/µm

Load (base plate horizontal / any orientation)

5 / 2.5

kg

max.

Holding force (base plate horizontal)

15

N

max.

Motor type

Brushless DC motor

Miscellaneous

Operating temperature range

0 to 50

°C

Material

Stainless steel, aluminum

Mass

1.7

kg

±5 % 

Cable length

2

m

±10 mm

Technical data specified at 20 ±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.

Drawings / Images

PI H-810 Drawing PI C-887 H-811 H-850

Order Information

The new H-810 hexapod systems offer additional functionality compared to the previous M-810 hexapod models they replace.Talk to your PI sales engineer for more information.

Mechanics with controller

H-810.D11Miniature-Hexapod Microrobot, Direct Drive, 2.5 mm/s, 5 kg Load, 2 m Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-810.D12Miniature-Hexapod Microrobot, Direct Drive, 2.5 mm/s, 5 kg Load, 2 m Cable, with 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device


Ask about custom designs!

Options

F-206.NCU
Rapid 3-Axis Piezo Nanopositioning System for Use in Combination with Hexapod Systems. Consists of P-611.3SFNanoCube®XYZ Nanopositioning System, 100 µm ×100 µm × 100 µm, Strain Gauge Sensors with Integrated Fiber Adapter Interface and E-760.3S0NanoCube® Piezo Controller Board, ISA Bus
F-206.VVU
Photometer Card, Visible Range, 2 Channels
F-206.iiU
Photometer Card, IR Range, 2 Channels

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Controllers / Drivers / Amplifiers

Related Products

Technology

Articles and Links

Downloads

fileadmin/images/filelist/zip.png H-810 STEP
zip 686 kB
fileadmin/images/filelist/pdf.png User Manual MS198E
H-810 Miniature-Hexapod Microrobot
pdf 1.1 MB 1.2.0 EN