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H-824 6-Axis Hexapod

Low-Profile, Precision Parallel-Kinematic System

H-824
    • Load capacity to 10 kg, self-locking version
    • Travel ranges to 45 mm / 25°
    • Actuator resolution to 7 nm
    • Min. incremental motion to 0.3 µm
    • Repeatability to ±0.1 µm / ±2.5 µrad
    • Velocity to 25 mm/s
    • Vacuum-compatible versions available
    • Sophisticated controller using vector algorithms, virtual pivot point
    • Comprehensive software package

Precision-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Vacuum-compatible versions to 10-6 hPa are available

Compact due to folded drive design

H-824.Gxx with DC gear motors
H-824.Dxx with powerful DC motors for higher velocity

Powerful digital controller, open software architecture

User-defined, stable pivot point, software-selectable. Positions commanded in Cartesian coordinates. Macro programming. Open source LabVIEW driver set. Work space simulation software. Virtual Hexapod machine software. Optional: Collision avoidance software (external obstacles).
Hexapods are by default configured and delivered as a system including a controller

  • C-887.52 compact bench-top controller for a lower system price. Digital I/O interfaces, e.g. for external triggering
  • C-887.11 19" controller, comprises the control for two additional single axes with servo motors. Options: Control of piezo axes, photometer cards for visible light or infrared light range

Upgrades for C-887.11 (order separately)

  • Analog interface/photometer cards for visible light (F-206.VVU) or the infrared light range (F-206.iiU)
  • F-206.NCU fast piezo nano-alignment system for alignment with nanometer precision

Accessories

  • C-887.MC manual control unit for Hexapods, USB, 3 m cable
  • C-887.VM1 PIVeriMove software for collision checking

Fields of application

Research and industry, standard and vacuum environments. For micromanipulation, biotechnology, semiconductor manufacturing

Specifications

H-824.Gxx

H-824.Dxx

Unit

Tolerance

for higher resolution and load

for higher velocity

Active axes

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Motion and positioning

Travel range* X, Y

±22.5

±22.5

mm

Travel range* Z

±12.5

±12.5

mm

Travel range* θX, θY

±7.5

±7.5

°

Travel range* θZ

±12.5

±12.5

°

Single-actuator design resolution

0.007

0.5

µm

Min. incremental motion X, Y, Z

0.3

1

µm

typ.

Min. incremental motion θX, θY, θZ

3.5

12

µrad

typ.

Backlash X, Y

3

1

µm

typ.

Backlash Z

1

1

µm

typ.

Backlash θX, θY

20

15

µrad

typ.

Backlash θZ

25

25

µrad

typ.

Repeatability X, Y

±0.5

±0.5

µm

typ.

Repeatability Z

±0.1

±0.1

µm

typ.

Repeatability θX, θY

±2

±2

µrad

typ.

Repeatability θZ

±2.5

±2.5

µrad

typ.

Max. velocity X, Y, Z

1

25

mm/s

Max. velocity θX, θY, θZ

11

270

mrad/s

Typ. Velocity X, Y, Z

0.5

10

mm/s

Typ. Velocity θX, θY, θZ

5.5

55

mrad/s

Mechanical properties

Stiffness X, Y

1.7

1.7

N/µm

Stiffness Z

7

7

N/µm

Load (base plate horizontal / any orientation)

10 / 5

5 / 2.5

kg

max.

Holding force, de-energized
(base plate horizontal / any orientation)

100 / 50

15 / 5

N

max.

Motor type

DC gear motor

DC motor

Miscellaneous

Operating temperature range

-10 to 50

-10 to 50

°C

Material

Aluminum

Aluminum

Mass

8

8

kg

±5 %

Cable length

3

3

m

±10 mm

Vacuum versions to 10-6 hPa are available under the following ordering number: H-824.xVx. Specifications for vacuum versions can differ.
Technical data specified at 20 ±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.

Drawings / Images

PI H-824 Drawing PI C-887 H-811 H-850

Order Information

H-824.G2Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/s, 10 kg Load, Sub-D Connector, Cable Set 3 m

H-824.D2Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Sub-D Connector, Cable Set 3 m

Vacuum versions

H-824.G2VCompact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/s, 5 kg Load, Vacuum-Compatible to 10-6 hPa, Sub-D Connector, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable

H-824.D2VCompact Hexapod Microrobot, Direct Drive, 12.5 mm/s, 2.5 kg Load, Vacuum-Compatible to 10-6 hPa, Sub-D Connector(s), 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable

Recommended controller

C-887.526D Hexapod Controller, TCP/IP, RS-232, Bench-Top Device, Control of Two Additional Servo-Motor Axes Included

Accessories

C-887.MCHexapod Control Unit, USB Connector, 3 m Cable

C-887.VM1PIVeriMove Software for the Collision Check

Hexapod systems with fieldbus interface

H-824.D31Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, EtherCAT® Interface

Configuration options (to be ordered as a system)

H-824.G11Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/s, 10 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-824.D11Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

Vacuum versions

H-824.GV1Compact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/s, 5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-824.DV1Compact Hexapod Microrobot, Direct Drive, 12.5 mm/s, 2.5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

Upgrades (to be ordered separately)

F-206.NCURapid 3-Axis Piezo Nanopositioning System for Use in Combination with Hexapod Systems. Consists of P-611.3SF NanoCube® XYZ Nanopositioning System, 100 µm × 100 µm × 100 µm, Strain Gauge Sensors with Integrated Fiber Adapter Interface and E-760.3S0 NanoCube® Piezo Controller Board, ISA Bus

F-206.iiUPhotometer Card, IR Range, 2 Channels

F-206.VVUPhotometer Card, Visible Range, 2 Channels

Ask about custom designs!

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Controllers / Drivers / Amplifiers

Related Products

Technology

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual MS200E
H-824 Compact Hexapod Microrobot
PDF 1.8 M 1.2.0 EN
fileadmin/images/filelist/pdf.png PI Datasheet H-824
6-Axis Hexapod Low-Profile, Precision Parallel-Kinematic System
PDF 955 K
fileadmin/images/filelist/zip.png H-824 STEP
ZIP 1.7 M