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H-824 6-Axis Hexapod

Low-Profile, Precision Parallel-Kinematic System

H-824
    • Load capacity to 10 kg, self-locking version
    • Travel ranges to 45 mm / 25°
    • Actuator resolution to 7 nm
    • Min. incremental motion to 0.3 µm
    • Repeatability to ±0.1 µm / ±2.5 µrad
    • Velocity up to 25 mm/s
    • Vacuum-compatible versions available
    • Sophisticated controller using vector algorithms, virtual pivot point
    • Extensive software support

Precision-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Vacuum-compatible versions to 10-6 hPa are available

Low-profile due to folded drive design

H-824.G1x with DC gear motors
H-824.D1x with powerful DC motors for higher velocity

Powerful digital controller, open software architecture

User-defined, stable pivot point, software-selectable. Positions commanded in Cartesian coordinates. Macro programming.
Open source LabVIEW driver set. Work space simulation software. Virtual Hexapod machine software.
Optional: Collision avoidance software (external obstacles).
H-824.xx1 includes C-887.11, 6D vector motion controller plus 2 additional servo axes. Options:

  • Analog interfaces / photometer cards for visible light (F-206.VVU) or the infrared light range (F-206.iiU)
  • F-206.NCU fast piezo nano-alignment system for alignment with nanometer precision

H-824.xx2 includes C-887.21 compact 6D vector motion controller

Fields of application

Research and industry, standard and vacuum environments. For micromanipulation, laser and optics alignment, biotechnology, tool control

Specifications

H-824.G1x

H-824.D1x

Unit

Tolerance

for higher resolution
and load

for higher velocity

Active axes

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Motion and positioning

Travel range* X, Y

±22.5

±22.5

mm

Travel range* Z

±12.5

±12.5

mm

Travel range* θX, θY

±7.5

±7.5

°

Travel range* θZ

±12.5

±12.5

°

Single-actuator design resolution

0.007

0.5

µm

Min. incremental motion X, Y, Z

0.3

1

µm

typ.

Min. incremental motion θX, θY, θZ

3.5

12

µrad

typ.

Backlash X, Y

3

1

µm

typ.

Backlash Z

1

1

µm

typ.

Backlash θX, θY

20

15

µrad

typ.

Backlash θZ

25

25

µrad

typ.

Repeatability X, Y

±0.5

±0.5

µm

typ.

Repeatability Z

±0.1

±0.1

µm

typ.

Repeatability θX, θY

±2

±2

µrad

typ.

Repeatability θZ

±2.5

±2.5

µrad

typ.

Max. velocity X, Y, Z

1

25

mm/s

Max. velocity θX, θY, θZ

11

270

mrad/s

Typ. velocity X, Y, Z

0.5

10

mm/s

Typ. velocity θX, θY, θZ

5.5

55

mrad/s

Mechanical properties

Stiffness X, Y

1.7

1.7

N/µm

Stiffness Z

7

7

N/µm

Load (base plate horizontal /
any orientation)

10 / 5

5 / 2.5

kg

max.

Holding force, de-energized
(base plate horizontal /
any orientation)

100 / 50

15 / 5

N

max.

Motor type

DC gear motor

DC motor

Miscellaneous

Operating temperature range

-10 to 50

-10 to 50

°C

Material

Aluminum

Aluminum

Mass

8

8

kg

±5 %

Cable length

3

3

m

±10 mm

Vacuum versions to 10-6 hPa are available under the following ordering number: H-824.xVx. Specifications for vacuum versions can differ.
Technical data specified at 20 ±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.

Drawings / Images

PI H-824 Drawing PI C-887 H-811 H-850

Order Information

Mechanics with controller

H-824.G11Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/s, 10 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-824.G12Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/s, 10 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device

H-824.D11Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-824.D12Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device 


Vacuum versions

H-824.GV1Compact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/s, 5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-824.GV2Compact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/s, 5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device

H-824.DV1Compact Hexapod Microrobot, Direct Drive, 12.5 mm/s, 2.5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-824.DV2Compact Hexapod Microrobot, Direct Drive, 12.5 mm/s, 2.5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device 


Hexapod systems with fieldbus interface

H-824.D31Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, EtherCAT® Interface

Ask about custom designs!

The new H-824 Hexapod systems offer additional functionality compared to the previous M-824 Hexapod models they replace.
For further information contact PI.

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Controllers / Drivers / Amplifiers

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Technology

Articles and Links

Downloads

fileadmin/images/filelist/zip.png H-824 STEP
zip 1.7 MB
fileadmin/images/filelist/pdf.png User Manual MS200E
H-824 Compact Hexapod Microrobot
pdf 1.8 MB 1.2.0 EN