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H-850 6-Axis Hexapod

For Loads of up to 250 kg

PI H-850
    • Load capacity to 250 kg
    • Repeatability to ±0.2 µm
    • Travel ranges to 100 mm / 60°
    • Actuator resolution to 5 nm
    • MTBF 20,000 h
    • Works in any orientation
    • Linear and rotary multi-axis scans
    • Vacuum-compatible versions available
    • Sophisticated controller using vector algorithms, virtual pivot point
    • Extensive software support

Reference-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Vacuum-compatible versions to 10-6 hPa are available

Drive variants

H-850.H1x with DC gear motors for heavy loads
H-850.G1x with powerful DC motors for higher velocity. Heavy-duty, ultra-high-resolution bearings for 24/7 applications

Powerful digital controller, open software architecture

User-defined, stable pivot point, software-selectable. Positions commanded in Cartesian coordinates. Macro programming.
Open source LabVIEW driver set. Work space simulation software. Virtual Hexapod machine software.
Optional: Collision avoidance software (external obstacles).
H-850.xx1 includes C-887.11, 6D vector motion controller plus 2 additional servo axes. Options:

  • Analog interfaces / photometer cards for visible light (F-206.VVU) or the infrared light range (F-206.iiU)
  • F-206.NCU fast piezo nano-alignment system for alignment with nanometer precision

H-850.xx2 includes C-887.21 compact 6D vector motion controller

Fields of application

Research and industry, standard and vacuum environments. For astronomy, optics positioning, aviation and aerospace

Specifications

H-850.H1x

H-850.G1x

Unit

Tolerance

for higher loads and holding forces

for higher velocity and precision

Active axes

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Motion and positioning

Travel range* X, Y

±50

±50

mm

Travel range* Z

±25

±25

mm

Travel range* θX, θY

±15

±15

°

Travel range* θZ

±30

±30

°

Single-actuator design resolution

0.005

0.05

µm

Min. incremental motion X, Y

1

1

µm

typ.

Min. incremental motion Z

0.5

0.5

µm

typ.

Min. incremental motion θX, θY, θZ

5

5

µrad

typ.

Backlash X, Y

4

5

µm

typ.

Backlash Z

1

1.5

µm

typ.

Backlash θX, θY

15

25

µrad

typ.

Backlash θZ

30

45

µrad

typ.

Repeatability X, Y

±1

±0.5

µm

typ.

Repeatability Z

±0.3

±0.2

µm

typ.

Repeatability θX, θY

±5

±3

µrad

typ.

Repeatability θZ

±9

±6

µrad

typ.

Max. velocity X, Y, Z

0.5

8

mm/s

Max. velocity θX, θY, θZ

6

100

mrad/s

Typ. velocity X, Y, Z

0.3

5

mm/s

Typ. velocity θX, θY, θZ

3

50

mrad/s

Mechanical properties

Stiffness X, Y

7

7

N/µm

Stiffness Z

100

100

N/µm

Load (base plate horizontal / any orientation)

250 / 50

50 / 20

kg

max.

Holding force, de-energized (base plate horizontal / any orientation)

2000 / 500

250 / 85

N

max.

Motor type

DC motor, gearhead

DC motor, gearhead

Miscellaneous

Operating temperature range

-10 to 50

-10 to 50

°C

Material

Aluminum

Aluminum

Mass

17

17

kg

±5 %

Cable length

3

3

m

±10 mm

Vacuum versions to 10-6 hPa are available under the following ordering number: H-850.xV. Specifications for vacuum versions can differ.
Technical data specified at 20 ±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.

Drawings / Images

PI H-850 Drawing PI C-887 H-811 H-850

Order Information

Mechanics with controller

H-850.G11Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 8 mm/s, 50 kg Load, Cable Set 3 m, with
6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-850.G12Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 8 mm/s, 50 kg Load, Cable Set 3 m, with
6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device

H-850.H11Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 0.5 mm/s, 250 kg Load, Cable Set 3 m, with
6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-850.H12Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 0.5 mm/s, 250 kg Load, Cable Set 3 m, with
6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device
 


Vacuum versions

H-850.GV1Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 2.5 mm/s, 25 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-850.GV2Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 2.5 mm/s, 25 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device

H-850.HV1Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 0.15 mm/s, 80 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis

H-850.HV2Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 0.15 mm/s, 80 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top Device 


Hexapod systems with fieldbus interface

H-850.G31Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 8 mm/s, 50 kg Load, Cable Set 3 m, with
6-D Hexapod Controller, EtherCAT® Interface

H-850.H31Hexapod Microrobotwith Excellent Position Repeatability, DC Motor Gearhead, 0.5 mm/s, 250 kg Load, Cable Set 3 m, with
6-D Hexapod Controller, EtherCAT® Interface


Ask about custom designs!

The new H-850 Hexapod systems offer additional functionality compared to the previous M-850 Hexapod models they replace.
For further information contact PI.

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Technology

Articles and Links

Downloads

fileadmin/images/filelist/zip.png H-850 STEP
zip 3.8 MB
fileadmin/images/filelist/pdf.png User Manual MS202E
H-850 Hexapod Microrobot with Excellent Position Repeatability
pdf 1.9 MB 1.1.0 EN