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LPS-24 Miniature Positioning Stage

With <1 Nanometer Sensor Resolution

PI LPS-24
    • Only 24 mm width
    • With integrated linear encoder with up to 0.5 nm resolution
    • Holding force 5 N
    • NEXACT® piezomotors
    • Vacuum-compatible versions to 10-6 hPa

Reference-class linear positioning system

Direct metrology with linear encoder; high guiding accuracy and position stability

NEXACT® piezo stepping drive

High-resolution piezoelectric linear drive. Compact design, holding forces up to 5 N. Nanostepping mode with <1 nm resolution. Constant velocity motion. Long lifetime, drive principle based exclusively on mechanical stiction

PIOne linear encoder

Optional. Based on interferometric measurement principle. 2 or 0.5 nm designs. Direction-sensing homing track. Compact design for easy integration in positioning systems. Patented Technology

Fields of application

Sample handling, positioning of samples and optical or mechanical components for installations limited in space. For use in research and industry.

Specifications

LPS-24
5862-9-1110

LPS-24
Vacuum
to 10
-6 hPa
5862-V-1120

LPS-24
5862-9-1230

LPS-24
Vacuum
to 10
-6 hPa
5862-V-1230

Unit

Tolerance

Active axes

X

X

X

X

Motion and positioning

Travel range

15

15

15

15

mm

Integrated sensor

Optical linear encoder

Optical linear
encoder

Optical linear encoder
PIOne

Optical linear
encoder
PIOne

Sensor resolution

150

20

0.5

0.5

nm

Open-loop resolution

0.03

0.03

0.03

0.03

nm

typ.

Min. incremental motion

150

40

1

1

nm

Velocity, closed-loop

10

10

10

10

mm/s

max.

Unidirectional repeatability

±50

±20

±20

±20

nm

typ.

Crosstalk, angular error (15 mm travel)

±100

±100

±100

±100

µrad

typ.

Crosstalk, angular error (1 mm travel)

±10

±10

±10

±10

µrad

typ.

Mechanical properties

Stiffness in motion direction

1

1

1

1

N/µm

±20 %

Load capacity

10

10

10

10

N

max.

Feed force (active)

5

5

5

5

N

max.

Holding force (passive)

5

5

5

5

N

min.

Drive properties

Motor type

NEXACT®
linear drive

NEXACT®
linear drive

NEXACT®
linear drive

NEXACT®
linear drive

Operating voltage

-10 to 45

-10 to 45

-10 to 45

-10 to 45

V

Miscellaneous

Operating temperature range

10 to 50

10 to 50

10 to 50

10 to 50

°C

Material

Steel

Steel

Steel

Steel

Mass

160

160

250

250

g

±5 %

Dimensions

24 mm × 33 mm × 20 mm

24 mm × 33 mm × 20 mm

24 mm × 63 mm × 20 mm

24 mm × 63 mm × 20 mm

Cable length

1.5 m

1.5 m on the
vacuum side,
2 m on the air side

1.5 m

1.5 m on the
vacuum side,
1.5 m on the air side

±10 mm

Connector

HD Sub-D (m)
15-pin (motor)
HD Sub-D (f)
15-pin (sensor)

Sub-D 15
(motor and sensor)
in vacuum;
Sub-D 15 to HD
Sub-D (m) 15-pin (motor)
HD Sub-D (f)
15-pin (sensor)

HD Sub-D (m)
15-pin (motor)
Sub-D (f)
15-pin (sensor)

LEMO
FGJ.1B.306.CLLM27
(motor), LEMO
FGJ.2B.308.CLLM21
(sensor) in vacuum;
LEMO to HD Sub-D (m)
15-pin (motor)
Sub-D (f) 15-pin (sensor)

Recommended controller / driver

E-861.1A1

E-861.1A1

E-861.1A1

E-861.1A1

Drawings / Images

PI LPS-24 150nm Drawing PI LPS-24 Drawing

Order Information

5862-9-1230LPS-24 Miniature Nanopositioner, 15 mm, 0.5 nm Resolution

5862-9-1110LPS-24 Miniature Linear Positioner, 15 mm, 150 nm Resolution

5862-V-1120LPS-24 Miniature Linear Positioner, 15 mm, 20 nm Resolution, Vacuum-Compatible to 10-6 hPa

5862-V-1230LPS-24 Miniature Nanopositioner, 15 mm, 0,5 nm Resolution, Vacuum-Compatible to 10-6 hPa

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Controllers / Drivers / Amplifiers

Technology

Downloads

fileadmin/images/filelist/pdf.png User Manual MP118E
LPS-24 Miniature Nanopositioner, Models 5862-9-1230, 5862-V-1230, 5862-9-1110, 5862-V-1120
pdf 1.6 MB 1.1.0 EN
fileadmin/images/filelist/zip.png LPS-24 STEP
zip 428 kB