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M-511 • M-521 • M-531 High-Precision Linear Translation Stage

High Travel Accuracy, Large Travel Ranges, Many Motor Variants

PI M-511
    • Travel ranges 102, 204 and 306 mm (4”, 8”, 12”)
    • Max. velocity up to 100 mm/s
    • Encoder resolution 50 nm
    • Load capacity to 100 kg
    • Zero-backlash ball screws
    • XY & XYZ combinations
    • Noncontact limit and reference point switches
    • MTBF >20,000 h

Reference-class linear stage

High travel accuracy and load capacity due to precision linear guides with preloaded recirculating ball bearings. Backlash-compensated recirculating ballscrews with 2 mm pitch. Stress-relieved aluminum for high stability.
XY and XYZ combinations possible using M-501/M-451 precision Z stages. Vacuum versions available

Drive types and position metrology

M-5x1.DD1: Direct drive. DC motor with integrated ActiveDrive amplifiers for high velocity in combination with directly-measuring linear encoder for high resolution and repeatability
M-5x1.DD2: Version with integrated brake

Direct drive. DC motor for high velocity in combination with precision rotary encoder
M-5x1.EC: Brushless DC motor with integrated block commutation
M-5x1.PD1: DC motor with integrated ActiveDrive amplifiers

DC servo motor with gearhead in combination with precision rotary encoder for high resolution and repeatability
M-5x1.DG1: DC motor with direct control (analog)
M-5x1.PG1: DC motor with integrated ActiveDrive amplifiers

M-5x1.2S1: Stepper motor

Noncontact limit switches. Noncontact reference point switches in the middle of the travel range

Fields of Application

Science and industry. Vacuum environment up to 10-6 hPa. Inspection, MEMS fabrication

Specifications

M-5x1.DD1 /
M-5x1.DD2

M-5x1.EC /
M-5x1.PD1

M-5x1.DG1 /
M-5x1.PG1

M-5x1.2S1

Unit

Tolerance

Motion and positioning

Travel range

M-511: 102 (4") / M-521: 204 (8") / M-531: 306 (12")

mm

Integrated sensor

Linear encoder

Rotary encoder

Rotary encoder

-

Sensor resolution

0.02 µm

4096

2048

-

Cts./rev.

Design resolution

0.05

0.49

0.033

0.31**

µm

typ.

Min. incremental motion

0.1

0.5

0.1

0.1

µm

typ.

Unidirectional repeatability

0.1

0.5

0.2

0.2

µm

typ.

Backlash

±0.2*

1

1

1

µm

typ.

Pitch / yaw

±25 / ±35 / ±35

µrad

Straightness /
flatness
per 100 mm

1

1

1

1

µm

Velocity

50

100

6

20

mm/s

max.

Mechanical properties

Spindle pitch
of ball screw

2

2

2

2

mm

Gear ratio

(28/12)4 ~ 29.6:1

Load capacity

1000

N

max.

Push / pull force

80

N

max.

Permissible lateral
force

200

N

max.

Drive properties

 

 

 

 

 

 

Motor type

DC motor
with
PWM control

DC motor
with
PWM control***

DC gear motor

2-phase
stepper motor**

 

 

Motor resolution

6400**

steps/rev.

 

Guiding

Precision linear guiding rails, recirculating ball bearings

Operating voltage

24 (PWM)

24 (PWM)

M-5x1.DG1:
0 to ±12

M-5x1.PG1: 24 (PWM)

24

V

 

Motor power

30

60

3

5

W

nominal

Torque

80

70

5

150

mNm

nominal

Reference point
and limit switches

Hall effect

Hall effect

Hall effect

Hall effect

 

 

Miscellaneous

Operating temperature range

10 to 50

-20 to 65

-20 to 65

-20 to 65

°C

Material

Al (black anodized)

Mass

5 (M-511) / 6.1 (M-521) / 7.2 (M-531)

kg

±5 %

Connector

Sub-D 15-pin, 3 m cable incl.

Recommended controllers

C-863

C-884

C-863

C-884

C-863

C-884

C-663

Ask about custom designs!
*Bidirectional repeatability for versions with linear encoder.
** Max. 0.85 A/phase; 400 full steps/rev.. motor resolution with C-663 stepper motor controller.
*** M-5xx.EC: Brushless DC motor with PWM control

Drawings / Images

PI M-5x1 Drawing

Order Information

Stages with 102 mm travel range:

M-511.DD1Precision Translation Stage, 102 mm, ActiveDrive DC Motor, Linear Encoder

M-511.DD2Precision Translation Stage, 102 mm, ActiveDrive DC Motor, Linear Encoder, Motor Brake

M-511.PD1Precision Translation Stage, 102 mm, ActiveDrive DC Motor, Rotary Encoder

M-511.ECPrecision Translation Stage, 102 mm, Brushless DC Motor, Rotary Encoder

M-511.DG1Precision Translation Stage, 102 mm, DC Gear Motor, Rotary Encoder

M-511.PG1Precision Translation Stage, 102 mm, ActiveDrive DC Gear Motor, Rotary Encoder

M-511.2S1Precision Translation Stage, 102 mm, Stepper Motor


Stages with 204 mm travel range:

M-521.DD1Precision Translation Stage, 204 mm, ActiveDrive DC Motor, Linear Encoder

M-521.DD2Precision Translation Stage, 204 mm, ActiveDrive DC Motor, Linear Encoder, Motor Brake

M-521.PD1Precision Translation Stage, 204 mm, ActiveDrive DC Motor, Rotary Encoder

M-521.ECPrecision Translation Stage, 204 mm, Brushless DC Motor, Rotary Encoder

M-521.DG1Precision Translation Stage, 204 mm, DC Gear Motor, Rotary Encoder

M-521.PG1Precision Translation Stage, 204 mm, ActiveDrive DC Gear Motor, Rotary Encoder

M-521.2S1Precision Translation Stage, 204 mm, Stepper Motor


Stages with 306 mm travel range:

M-531.DD1Precision Translation Stage, 306 mm, ActiveDrive DC Motor, Linear Encoder

M-531.DD2Precision Translation Stage, 306 mm, ActiveDrive DC Motor, Linear Encoder, Motor Brake

M-531.PD1Precision Translation Stage, 306 mm, ActiveDrive DC Motor, Rotary Encoder

M-531.ECPrecision Translation Stage, 306 mm, Brushless DC Motor, Rotary Encoder

M-531.DG1Precision Translation Stage, 306 mm, DC Gear Motor, Rotary Encoder

M-531.PG1Precision Translation Stage, 306 mm, ActiveDrive DC Gear Motor, Rotary Encoder

M-531.2S1Precision Translation Stage, 306 mm, Stepper Motor


Vacuum versions and special designs available on request
Adapter plates, adapter brackets, and accessories

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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual MP113E
M-511, M-521, M-531 Micropositioning Stages
PDF 1.6 M 1.0.0 EN
fileadmin/images/filelist/pdf.png PI Datasheet M-511 • M-521 • M-531
High-Precision Linear Translation Stage High Travel Accuracy, Large Travel Ranges, Many Motor Variants
PDF 751 K
fileadmin/images/filelist/zip.png M-511 STEP
ZIP 3.8 M
fileadmin/images/filelist/zip.png M-521 STEP
ZIP 3.5 M
fileadmin/images/filelist/zip.png M-531 STEP
ZIP 3.6 M
fileadmin/images/filelist/pdf.png PI Mounting Adapters for Micropositioning
Overview of all possible combinations of PI linear, rotary and tilt stages
PDF 760 K