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M-511.HD Nano-Precision Heavy-Duty Stage

Hybrid DC / Piezo Precision Stage, High Speed, 2 nm Resolution

PI M-511.HD
    • Simultaneous control of piezo-flexure drives and DC-servo / ball screw drives
    • Travel range to 100 mm
    • Max. velocity 50 mm/s
    • Repeatability in the nanometer range
    • Direct metrology: Linear encoder resolution 2 nm
    • Millisecond settling time to nanometer precision
    • Frictionless piezo drive and flexure decoupled ball screw
    • Active compensation of backlash and stick / slip effects
    • Excellent velocity control

Specifications

M-511.HD

Unit

Tolerance

Active axes

X

Motion and positioning

Travel range

100

mm

Integrated sensor

Linear encoder

Sensor resolution

0.002

µm

Design resolution

0.002

µm

Min. incremental motion

0.004

µm

Hysteresis at the platform

0.01

µm

Unidirectional repeatability

0.01

µm

Accuracy

<0.05

µm

Pitch / yaw

±25

µrad

Straightness

1

µm

Flatness

1

µm

Velocity

50

mm/s

max.

Reference point switch repeatability

1

µm

Mechanical properties

Drive screw

Recirculating ball screws

Guiding

Precision linear guiding rails, recirculating ball bearings

Thread pitch

2

mm/rev.

Load capacity

200

N

max.

Push / pull force

80 / 80

N

max.

Lateral force

200

N

max.

Drive properties

Drive type

Hybrid drive: DC motor with piezo

Motor type

DC motor

Operating voltage (motor)

24

V

Motor power

30

W

Piezo drive type

PICMA® multilayer piezo with flexure guides

Piezo voltage

±36

V

Reference point and limit switches

Hall effect

Miscellaneous

Operating temperature range

-20 to 65

°C

Material

Al (black anodized)

Mass

5.1

kg

Recommended controller / driver

C-702 hybrid motor controller

Ask about custom designs!

Drawings / Images

PI M-511.HD Drawing PI M-511.HD Drawing PI M-511.HD Drawing

Order Information

M-511.HDUltra-High-Precision Hybrid Translation Stage, 100 mm Travel, 2 nm Linear Encoder Resolution

Ask about custom designs!

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Controllers / Drivers / Amplifiers

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual MP84E
M-511.HD Ultra-High-Resolution Positioning Stage with Hybrid Drive
pdf 0.9 MB 1.0.0 EN