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M-663 Compact Linear Positioning Stage

Fast Linear Motor, Linear Encoder

PI M-663
    • Max. velocity 250 mm/s
    • Travel range 18 mm
    • Excellent start / stop dynamics
    • Direct-metrology linear encoder with 0.1 and 0.6 µm resolution
    • XY combinations without adapter plate possible
    • Self-locking, no heat generation at rest, no servo jitter
    • Vacuum-compatible versions available

Precision-class micropositioning stage

Integrated piezoceramic direct drive. Vacuum-compatible versions to 10-6 hPa are available

PILine® piezo ultrasonic drive

Self-locking, no heat generation at rest. Excellent start / stop dynamics. Centered ball bearings. Non-contact reference point switch

Direct-measuring principle

Non-contact, direct-measuring, optical linear encoder

Valid patents

US patent no. 6,765,335B2
European patent no. 1267425B1

Fields of application

Research and industry. For micromanipulation, automation, biotechnology

Specifications

M-663.4U
M-663.4UY

M-663.5U
M-663.5UY

Unit

Tolerance

Active axes

X

X

Motion and positioning

Travel range

18

18

mm

Integrated sensor

Linear encoder

Linear encoder

Sensor resolution

0.1

0.6

µm

Min. incremental motion

0.3

2

µm

typ.

Unidirectional repeatability

0.2

0.4

µm

typ.

Bidirectional repeatability

±0.5

±2

µm

typ.

Pitch / yaw

±200

±200

µrad

typ.

Velocity

250

250

mm/s

max.

Mechanical properties

Load capacity

5

5

N

max.

Push / pull force

2

2

N

max.

Holding force

2

2

N

max.

Drive properties

Motor type

U-161 PILine® ultrasonic piezomotor

U-161 PILine® ultrasonic piezomotor

Reference point switch

Optical

Optical

Miscellaneous

Operating temperature range

-20 to 50

-20 to 50

°C

Material

Al (black anodized)

Al (black anodized)

Dimensions

35 mm × 35 mm × 15 mm 

35 mm × 35 mm × 15 mm

Mass, including cabling

85

85

g

±5 % 

Cable length

1.5

1.5

m

±10 mm

Connector

MDR, 14-pin

MDR, 14-pin

Recommended controller

C-867 PILine® Motion Controller

C-867 PILine® Motion Controller

Ask about custom designs!
A version with cable exit orthogonal to direction of motion is available as the M-663.4U, M-663.5U.
A version with cable exit in direction of motion is available as the M-663.4UY, M-663.5UY.
Vacuum-compatible versions to 10-6 hPa available.

Drawings / Images

PI M-663 Drawing

Order Information

M-663.4UPILine® Translation Stage, 18 mm, 0.1 µm Resolution, Cable Exit Orthogonal to Direction of Motion

M-663.4UYPILine® Translation Stage, 18 mm, 0.1 µm Resolution, Cable Exit in Direction of Motion

M-663.5UPILine® Translation Stage, 18 mm, 0.6 µm Resolution, Cable Exit Orthogonal to Direction of Motion

M-663.5UYPILine® Translation Stage, 18 mm, 0.6 µm Resolution, Cable Exit in Direction of Motion

 

Vacuum versions, available on request

M-663.4VPILine® Translation Stage, 18 mm, 0.1 µm Resolution, Cable Exit Orthogonal to Direction of Motion, Vacuum Compatible to 10-6 hPa

M-663.4VYPILine® Translation Stage, 18 mm, 0.1 µm Resolution, Cable Exit in Direction of Motion, Vacuum Compatible to 10-6 hPa

M-663.5VPILine® Translation Stage, 18 mm, 0.6 µm Resolution, Cable Exit Orthogonal to Direction of Motion, Vacuum Compatible to 10-6 hPa

M-663.5VYPILine® Translation Stage, 18 mm, 0.6 µm Resolution, Cable Exit in Direction of Motion, Vacuum Compatible to 10-6 hPa

 

 

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Controllers / Drivers / Amplifiers

Related Products

Downloads

fileadmin/images/filelist/pdf.png User Manual MP115E
M-663 PILine® Translation Stage
pdf 1.6 MB 1.2.0 EN
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions MP121EK
M-66x, M-68x, U-628 PILine Versteller® / PILine® Stages
pdf 652 kB 1.0.0 DE / EN
fileadmin/images/filelist/pdf.png Technical Note M663T0015
M-663.AB Adapter Box for PILine® Stages, M-663.Axx Extension Cables
pdf 102 kB 2010-12-13 EN
fileadmin/images/filelist/zip.png M-663 STEP
zip 2.0 MB