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M-664 Precision Stage with Linear Piezo Drive

Fast, Self-Locking, Low Profile

PI M-664.164
    • Travel range 25 mm
    • Only 15 mm profile height
    • Linear encoder with 100 nm resolution
    • Max. velocity 400 mm/s
    • Self-locking at rest, no heat generation, no servo jitter
    • Direct Metrology Linear Encoder with 0.1 µm Resolution
    • Excellent guiding accuracy through crossed roller bearings
    • Compact XY combination possible
    • Excellent start / stop dynamics

Precision-class micro translation stage

Integrated piezo-ceramic direct drive. Compact XY combinations available

PILine® piezo ultrasonic drive

Self-locking, with no heat generation at rest. Excellent start / stop dynamics. Crossed roller bearings. Noncontact limit and reference point switches

Direct-metrology linear encoder

High accuracy and repeatability

Fields of application

Research and industry. For micromanipulation, quality assurance testing, biotechnology

Valid patents

US patent no. 6,765,335B2European patent no. 1267425B1

Accessories

M-664.AP1Adapter Plate for XY Mounting of M-664, 4 mm high

Specifications

M-664.164

Tolerance

Active axes

X

Motion and positioning

Travel range

25 mm

Integrated sensor

Linear encoder

Sensor resolution

0.1 µm

Min. incremental motion

0.6 µm

typ.

Bidirectional repeatability

±1 µm

typ.

Unidirectional repeatability

±0.2 µm

typ.

Pitch

±75 µrad

typ.

Yaw

±50 µrad

typ.

Velocity

400 mm/s

max.

Reference point switch repeatability

1 µm

typ.

Mechanical properties

Load capacity

25 N

max.

Push / pull force

2.5 N

max.

Holding force

2.5 N

max.

Drive properties

Motor type

P-664 PILine® Ultrasonic Piezo Drive

Limit and reference point switches

Hall-effect

Miscellaneous

Operating temperature range

0 to 50 °C

Material

Al (black anodized)

Dimensions

90 mm x 60 mm x 15 mm

Mass

0.225 kg

±5 %

Cable length

1.5 m

±10 mm

Connector

MDR, 14-pin

Recommended controller / driver

C-867 controller / driver

Ask about custom designs!

Drawings / Images

PI M-664.164 Drawing Pi piline family

Order Information

M-664.164PILine® Low-Profile Micropositioning Stage with P-664 Piezo Linear Motor, 25 mm, 2.5 N

M-664.AP1Adapter Plate for XY Mounting of M-664, 4 mm high


Ask about custom designs!

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Controllers / Drivers / Amplifiers

Related Products

Technology

Downloads

fileadmin/images/filelist/pdf.png User Manual MP96E
M-664 PILine® Micro Positioning Stage
PDF 796 K 1.2.0 EN
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions MP121EK
M-66x, M-68x, U-521, U-62x, U-651 PILine Versteller® / PILine® Stages
PDF 885 K 3.0.0 DE / EN
fileadmin/images/filelist/pdf.png PI Datasheet M-664
Precision Stage with Linear Piezo Drive Fast, Self-Locking, Low Profile
PDF 781 K
fileadmin/images/filelist/zip.png M-664 STEP
ZIP 40 K