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M-683 Dynamic Micropositioning Stage

Low Profile, Linear Encoder

PI M-683
    • Piezoceramic linear drive with excellent dynamics
    • Max. velocity 350 mm/s
    • Low profile: only 21 mm
    • Travel range 50 mm
    • Encoder resolution 0.1 µm
    • Vacuum-compatible versions available
    • Compact XY combination possible
    • Excellent guiding accuracy due to crossed roller bearings
    • Self-locking, no heat generation at rest, no servo jitter
    • Excellent start / stop dynamics
    • Integrated linear encoder option for highest accuracy

Precision-Class Micropositioning Stage

Integrated piezoceramic direct drive. Vacuum-compatible versions to 10-6 hPa are available

PILine® Piezo Ultrasonic Drive

Self-locking, no heat generation at rest. Excellent start / stop dynamics. Crossed roller guides. Non-contact limit and reference point switches

Direct-Metrology Linear Encoder

Excellent linearity and repeatability

Fields of Application

Research and industry

Specifications

M-683.2U4

Unit

Tolerance

Active axes

X

Motion and positioning

Travel range

50

mm

Integrated sensor

Linear encoder

Sensor resolution

0.1

µm

Min. incremental motion

0.3

µm

typ.

Bidirectional repeatability

±1

µm

typ.

Unidirectional repeatability

0.2

µm

typ.

Pitch

±150

µrad

typ.

Yaw

±50

µrad

typ.

Velocity

350

mm/s

max.

Reference point switch repeatability

±1

µm

typ.

Mechanical properties

Guiding

Crossed-roller bearings

Load capacity

50

N

max.

Push / pull force

6

N

max.

Holding force

6

N

max.

Drive properties

Motor type

PILine® U-164 (dual motor)

Reference point switch

Optical

Limit switches

Hall-effect

Miscellaneous

Operating temperature range

0 to 50

°C

Material

Al (black anodized)

Dimensions

130 mm × 95 mm × 21 mm

Mass

0.65

kg

±5 %

Cable length

1.5

m

±10 mm

Connector

MDR, 14-pin

Recommended controller

C-867 PILine® controller incl. driver

Ask about custom designs!

Drawings / Images

PI M-683 Drawing

Order Information

M-683.2U4PILine® High-Speed Linear Stage, 50 mm, 6 N

M-683.2V4PILine® High-Speed Linear Stage, 50 mm, 6 N, Vacuum Compatible to 10-6 hPa


Ask about custom designs!

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Controllers / Drivers / Amplifiers

Related Products

Technology

Downloads

fileadmin/images/filelist/pdf.png User Manual MP99E
M-683 PILine® High-Speed Linear Stage
PDF 1.1 M 1.4.0 EN
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions MP121EK
M-66x, M-68x, U-521, U-62x, U-651 PILine Versteller® / PILine® Stages
PDF 885 K 3.0.0 DE / EN
fileadmin/images/filelist/pdf.png PI Datasheet M-683
Dynamic Micropositioning Stage Low Profile, Linear Encoder
PDF 731 K
fileadmin/images/filelist/zip.png M-683 STEP
ZIP 62 K