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M-686 XY Stage with Piezoceramic Linear Motors

High Stability and Speed, Low-Profile, Direct Position Measurement

PI M-686.D64
    • Higher stability with selfclamping linear motors
    • Max. velocity 100 mm/s
    • Very low profile of only 32 mm, no protruding parts
    • Travel range 25 × 25 mm
    • 100 nm, optical linear encoders provide excellent repeatability and accuracy
    • Self-locking, no heat generation at rest, no servo jitter
    • Excellent start / stop dynamics
    • Clear aperture 78 × 78 mm, 65 × 65 mm at full displacement

Precision-class XY stage

With fast direct drive. Clear aperture 78 mm × 78 mm, 65 mm × 65 mm at full displacement

PILine® piezo ultrasonic drive
Self-locking, no heat generation at rest. Excellent start / stop dynamics. Flat supporting surface, no lead screw ducts or flange-mounted motors. Crossed roller guide for higher running accuracy and load capacity. Non-contact limit and reference point switches

Direct-measuring principle
Non-contact, direct-measuring, optical linear encoder per axis. High repeatability

 

Valid patents

US patent no. 6,765,335B2
European patent no. 1267425B1

Fields of application

Research and industry. For microscopy, biotechnology, laboratory automation. Special versions for standard light microscopes available on request

The following stages fit directly

P-561 • P-562 • P-563 PIMars Nanopositioning Stage
P-541.2 • P-542.2 Piezo XY Stage
P-541.Z Vertical Nanopositioning Stage

Specifications

M-686.D64

Unit

Tolerance

Active axes

XY

Motion and positioning

Travel range

25 mm × 25 mm

Integrated sensor

Linear encoder

Sensor resolution

0.1

µm

Design resolution

0.1

µm

typ.

Min. incremental motion

0.3

µm

typ.

Bidirectional repeatability

±0.3

µm

Pitch / yaw

±50

µrad

typ.

Velocity

100

mm/s

max.

Mechanical properties

Load capacity*

50

N

max.

Push / pull force

7

N

max.

Holding force

6

N

max.

Drive properties

Motor type

PILine® U-164 (dual motor)

Reference point switch

Optical

Limit switches

Hall-effect

Miscellaneous

Operating temperature range

-20 to 50

°C

Material

Al (black anodized)

Dimensions

170 mm × 170 mm × 32 mm

Mass

1.8

kg

±5 %

Cable length

1.5

m

±10 mm

Connector

2 × MDR, 14-pin

Recommended controller/driver

C-867 PILine® Motion Controller

* 10 N for maximum velocity.

Drawings / Images

Order Information

M-686.D64XY Stage with PILine® Piezo Motor Drives, 25 mm × 25 mm, 7 N, 0.1 µm Linear Encoder

 

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Related Products

Technology

Downloads

fileadmin/images/filelist/pdf.png User Manual MP67E
M-686 XY Stage with PILine® Piezo Motor Drives
pdf 1.0 MB 1.3.0 EN
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions MP121EK
M-66x, M-68x, U-628 PILine Versteller® / PILine® Stages
pdf 652 kB 1.0.0 DE / EN
fileadmin/images/filelist/zip.png M-686 STEP
zip 96 kB