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N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform

Nanometer Precision for Semiconductor Industry, Wafer Alignment

PI N-510.00
    • Self-locking, no heat generation at rest
    • Vacuum compatible and non-magnetic designs feasible
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy
    • NEXLINE® piezo walking drive free from wear and tear
    • Load capacity to 200 N
    • High precision with integrated 5 nm incremental sensors + picometer resolution dithering mode

     

     

Specifications

Travel ranges

Max. load

Dimensions

N-510
NEXLINE® Z, tip, tilt platform

Z: 1.3 mm
θX, θY: 10 mrad

200 N

Ø 360 mm (14.2'')
clear aperture: Ø 250 mm

Order Information

This product is currently not in our price list. It is an example of what is feasible with our technology. We would like to work with you on a solution that fits your needs. For this purpose, please contact PI.

N-510KAWPNEXLINE® Z / Tip / Tilt Platform

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Technology

Downloads

fileadmin/images/filelist/pdf.png PI Datasheet N-510KAWP
High-Force NEXLINE® Z / Tip / Tilt Platform Nanometer Precision for Semiconductor Industry, Wafer Alignment
PDF 668 K