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N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform

Nanometer Precision for Semiconductor Industry, Wafer Alignment

PI N-510.00
    • Self-locking, no heat generation at rest
    • Vacuum compatible and non-magnetic designs feasible
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy
    • NEXLINE® piezo walking drive free from wear and tear
    • Load capacity to 200 N
    • High precision with integrated 5 nm incremental sensors + picometer resolution dithering mode

     

     

Specifications

Travel ranges

Max. load

Dimensions

N-510
NEXLINE® Z, tip, tilt platform

Z: 1.3 mm
θX, θY: 10 mrad

200 N

Ø 360 mm (14.2'')
clear aperture: Ø 250 mm

Order Information

N-510KAWPNEXLINE® Z / Tip / Tilt Platform

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