N-510KAWP High-Force NEXLINE® Z / Tip / Tilt Platform

Nanometer Precision for Semiconductor Industry, Wafer Alignment

PI N-510.00
    • Self-locking, no heat generation at rest
    • Vacuum compatible and non-magnetic designs feasible
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy
    • NEXLINE® piezo walking drive free from wear and tear
    • Load capacity to 200 N
    • High precision with integrated 5 nm incremental sensors + picometer resolution dithering mode




Travel ranges

Max. load


NEXLINE® Z, tip, tilt platform

Z: 1.3 mm
θX, θY: 10 mrad

200 N

Ø 360 mm (14.2'')
clear aperture: Ø 250 mm

Order Information

N-510KAWPNEXLINE® Z / Tip / Tilt Platform

was added to the shopping cart for price quotes. OK
Click on the order information of the product you would like to add to your shopping cart for price quotes. Shopping Cart Help
To complete your quotation request, click on the shopping cart icon in the top menu bar and fill out the form. Shopping Cart Help



fileadmin/images/filelist/pdf.png PI Datasheet N-510KAWP
pdf 668 kB