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P-363 PicoCube XY(Z) Piezo Scanner

High-Dynamics Nanoscanner for Scanning Probe Microscopy

PI P-363
    • Ultra-high-performance closed-loop scanner for AFM / SPM
    • Compact manipulation tool for bio- / nanotechnology
    • Resonant frequency 9.8 kHz
    • Capacitive sensors for highest accuracy
    • Parallel-motion metrology for automated compensation of guiding errors
    • Resolution 50 picometer
    • Travel range 5 µm × 5 µm × 5 µm
    • Vacuum-compatible versions

Specifications

P-363.3CD

P-363.2CD

Unit

Active axes

X, Y, Z

X, Y

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Open-loop travel in X, Y, -250 to +250 V

±3

±3

µm

Open-loop travel in Z, -250 to +250 V

±2.7

-

µm

Closed-loop travel in X, Y

±2.5

±2.5

µm

Closed-loop travel in Z

±2.5

-

µm

Open-loop resolution

0.03*

0.03*

nm

Closed-loop resolution

0.1

0.1

nm

Linearity error

0.05

0.05

%

Repeatability

1**

1**

nm

Pitch / yaw in X, Y

0.5

0.5

µrad

Runout X, Y (Z motion)

0.2

-

µrad

Straightness in X, Y

3

3

nm

Flatness in X, Y

<10

<10

nm

Crosstalk in X, Y (motion in Z)

5

-

nm

Mechanical properties

Unloaded resonant frequency in X, Y

3.1

4.2

kHz

Unloaded resonant frequency in Z

9.8

-

kHz

Loaded resonant frequency in X, Y

1.5 (20 g)

2.1 (20 g)

kHz

Load capacity

10

10

N

Ceramic type

PICA, PICA Shear

PICA Shear

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Titanium

Titanium

Dimensions

30 mm × 30 mm × 40 mm

30 mm × 30 mm × 28 mm

Mass

225

190

g

Cable length

1.5

1.5

m

Sensor / voltage connection***

Sub-D connector PicoCube

Sub-D connector PicoCube

Recommended controller

E-536 PicoCube Controller

E-536 PicoCube Controller

* The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-536.
* With E-536.3xH controller.
** For 10 % travel in Z; 50 nm for 100 % travel in Z.

Ask about custom designs!

Drawings / Images

PI P-363.3Cx Drawing PI P-363.2Cx Drawing PI P-363 Diagramm PI P-363 Diagramm

Order Information

P-363.2CDPicoCube High-Precision XY Nanopositioning System, 5 µm × 5 µm, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)

P-363.2CLPicoCube High-Precision XY Nanopositioning System, 5 µm × 5 µm, Parallel Metrology, Capacitive Sensors, LEMO Connector(s)

P-363.3CDPicoCube High-Precision XYZ Nanopositioning System, 5 µm × 5 µm × 5 µm, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)

P-363.3CLPicoCube High-Precision XYZ Nanopositioning System, 5 µm × 5 µm × 5 µm, Parallel Metrology, Capacitive Sensors, LEMO Connector(s)

P-363.3CDPicoCube High-Precision XYZ Nanopositioning System, 5 µm × 5 µm × 5 µm, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)

P-363.3CLPicoCube High-Precision XYZ Nanopositioning System, 5 µm × 5 µm × 5 µm, Parallel Metrology, Capacitive Sensors, LEMO Connector(s)


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