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P-517 • P-527 Multi-Axis Piezo Scanner

High-Dynamics Nanoscanner for Scanning Probe Microscopy

PI P-517.3CL
    • 2- and 3-axis versions (XY and XYθZ)
    • Travel ranges to 200 µm
    • Sub-nanometer resolution

Specifications

P-517.2CL
P-517.2CD

P-527.2CL
P-527.2CD

P-517.3CL
P-517.3CD

P-527.3CL
P-527.3CD

P-517.RCD

P-527.RCD

Unit

Tolerance

Active axes

X, Y

X, Y

X, Y, Z

X, Y, Z

X, Y, θZ

X, Y, θZ

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

130 µm

250 µm

X, Y: 130 µm
Z: 25 µm

X, Y: 250 µm
Z: 25 µm

X, Y: 130 µm
θZ: ±1.3 mrad

X, Y: 250 µm
θZ: ±2.5 mrad

min. (20 %/-0 %)

Closed-loop travel

100 µm

200 µm

X, Y: 100 µm
Z: 20

X, Y: 200 µm
Z: 20

X, Y: 100 µm
θZ: ±1 mrad

X, Y: 200 µm
θZ: ±2 mrad

Open-loop resolution

0.3 nm

0.5 nm

X, Y: 0.3 nm
Z: 0.1 nm

X, Y: 0.5 nm
Z: 0.1 nm

X, Y: 0.3 nm
θZ: 0.1 µrad

X, Y: 0.5 nm
θZ: 0.1 µrad

typ.

Closed-loop resolution

1 nm

2 nm

X, Y: 1 nm
Z: 0.1 nm

X, Y: 2 nm
Z: 0.1 nm

X, Y: 1 nm
θZ: 0.3 µrad

X, Y: 2 nm
θZ: 0.3 µrad

typ.

Linearity error

0.03

0.03

0.03

0.03

0.03

0.03

%

typ.

Repeatability

±5 nm

±10 nm

X, Y: ±5 nm
Z: ±1 nm

X, Y: ±10 nm
Z: ±1 nm

X, Y: ±5 nm
θZ: ±0.5 µrad

X, Y:±10 nm
θZ: ±1 µrad

typ.

Mechanical properties

Stiffness

2

1

X, Y: 2
Z: 15

X, Y: 1
Z: 15

2

1

N/µm

±20 %

Resonant frequency, no load

450

350

X, Y: 450
Z: 1100

X, Y: 350
Z: 1100

X, Y: 450
θZ: 400

X, Y: 350
θZ: 300

Hz

±20 %

Resonant frequency in X, Y, at 500 g

250

190

250

190

250

190

Hz

±20 %

Resonant frequency in X, Y, at 2500 g

140

110

140

110

140

110

Hz

±20 %

Push / pull force capacity in motion direction

50 / 30

50 / 30

50 / 30

50 / 30

50 / 30

50 / 30

N

max.

Drive properties

Piezo ceramic

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

9.2

9.2

X, Y: 9
Z: 6

X, Y: 9
Z: 6

9

9

µF

±20 %

Dynamic Operating Current Coefficient*

11.5

5.8

X, Y: 11.5
Z: 37

X, Y: 5.5
Z: 37

11.5

5.5

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Mass

0.14

0.14

0.145

0.145

0.14

0.14

kg

±5 %

Sensor / voltage connection

CL version: LEMO

CD version: Sub-D Special

CL version: LEMO

CD version: Sub-D Special

CL version: LEMO

CD version: Sub-D Special

CL version: LEMO

CD version: Sub-D Special

Sub-D Special

Sub-D Special

The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise-equivalent motion with the E-503 piezo amplifier module or E-710 digital piezo controller.
* Dynamic Operating Current Coefficient (DOCC) of the linear axes in µA per hertz and µm. Electrical capacitance and DOCC of the rotational axes are based on differential X and Y motion, therefore not stated. Example: P-527.2xx: Sinusoidal operation with 30 µm at 10 Hz requires approximately 1.8 mA current.

Recommended controllers for CL versions:

Single-channel (1 per axis): E-610 servo-controller / amplifier, E-625 servo-controller, bench-top, E-621 controller module
Multi-channel: E-500 modular piezo controller system with E-503 amplifier module (three channels) or E-505 (1 per axis, high-power) and E-509 controller

Recommended controllers for CD versions:

Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board
Ask about custom designs!

Drawings / Images

PI P-571 Drawing

Order Information

P-517.2CLPrecision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

P-517.2CDPrecision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-527.2CLPrecision XY Nanopositioning System, 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

P-527.2CDPrecision XY Nanopositioning System, 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-517.3CLPrecision XYZ Nanopositioning System, 100 µm × 100 µm × 20 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

P-517.3CDPrecision XYZ Nanopositioning System, 100 µm × 100 µm × 20 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-527.3CDPrecision XYZ Nanopositioning System, 200 µm × 200 µm × 20 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-517.RCDPrecision XY / Rotation Nanopositioning System, 100 µm × 100 µm, 2 mrad, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-527.RCDPrecision XY / Rotation Nanopositioning System, 200 µm × 200 µm, 4 mrad, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)


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Controllers / Drivers / Amplifiers

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ82E
P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors
pdf 0.9 MB 3.0.0 EN
fileadmin/images/filelist/zip.png P-5x7 STEP
zip 221 kB
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 664 kB 2.0.0 DE / EN