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P-518 • P-528 • P-558 Piezo Z / Tip / Tilt Stage

High-Dynamics with Large Clear Aperture

PI P-518.ZCD
    • 1- and 3-axis versions
    • Closed-loop vertical / tilt range to 200 µm / 2 mrad (open-loop to 240 µm / 2.4 mrad)
    • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
    • Frictionless, high-precision flexure guiding system
    • Outstanding lifetime due to PICMA® piezo actuators
    • Clear aperture 66 mm × 66 mm
    • Highest linearity and stability with capacitive sensors

Specifications

P-558.ZCD
P-558.ZCL

P-558.TCD

P-518.ZCD
P-518.ZCL

P-518.TCD

P-528.ZCDP-528.ZCL

P-528.TCD

Unit

Tolerance

Active axes

Z

Z, θX, θY

Z

Z, θX, θY

Z

Z, θX, θY

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel in Z at -20 to 120 V

60

60

140

140

240

240

µm

min. (20 % / -0 %)

Open-loop tilt angle in θX, θY at -20 to 120 V

±0.3

±0.7

±1.2

mrad

min. (20 % / -0 %)

Closed-loop travel in Z

50

50

100

100

200

200

µm

Closed-loop tilt angle in θX, θY

±0.25

±0.5

±1

mrad

Open-loop resolution in Z

0.2

0.2

0.2

0.4

0.6

0.6

nm

typ.

Open-loop resolution in θX, θY

0.02

0.04

0.06

µrad

typ.

Closed-loop resolution in Z

0.5

0.5

0.8

0.8

1

1

nm

typ.

Closed-loop resolution in θX, θY

0.05

0.05

0.1

µrad

typ.

Linearity error in θX, θY

0.03

0.03

0.03

%

typ.

Repeatability in Z

±5

±5

±5

±5

±10

±10

nm

typ.

Repeatability in θX, θY

±0.03

±0.05

±0.1

µrad

typ.

Crosstalk θZ (motion in Z)

<10

<10

<10

<10

<20

<20

µrad

typ.

Crosstalk θX, θY (motion in Z)

<50

<50

<50

<50

<100

<100

µrad

typ.

Mechanical properties

Stiffness in Z

4

4

2.7

2.7

1.5

1.5

N/µm

±20 %

Unloaded resonant frequency in Z

570

570

500

500

350

350

Hz

±20 %

Unloaded resonant frequency in θX, θY

610

530

390

Hz

±20 %

Resonant frequency in Z, at 500 g

410

410

350

350

210

210

Hz

±20 %

Resonant frequency in θX, θY, at 500 g

430

370

250

Hz

±20 %

Resonant frequency in Z, at 2500 g

245

245

200

200

130

130

Hz

±20 %

Resonant frequency in θX, θY, at 2500 g

240

190

115

Hz

±20 %

Push / pull force capacity

100 / 50

100 / 50

100 / 50

100 / 50

100 / 50

100 / 50

N

max.

Drive properties

Piezo ceramic

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

6

6

8.4

8.4

14.8

14.8

µF

±20 %

Dynamic Operating Current Coefficient*

15

15

10.5

10.5

9.2

9.2

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Dimensions

150 mm × 150 mm × 30 mm

150 mm × 150 mm × 30 mm

150 mm × 150 mm × 30 mm

150 mm × 150 mm × 30 mm

150 mm × 150 mm × 30 mm

150 mm × 150 mm × 30 mm

Mass

1380

1380

1400

1400

1420

1420

g

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

CL version: LEMO

CD version: Sub-D Special

Sub-D Special

CL version: LEMO

CD version: Sub-D Special

Sub-D Special

CL version: LEMO

CD version: Sub-D Special

Sub-D Special

The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise-equivalent motion with the E-503 piezo amplifier module or E-710 digital piezo controller.
* Dynamic Operating Current Coefficient (DOCC) of the linear axes in µA per hertz and µm. Electrical capacitance and DOCC of the rotational axes are based on differential X and Y motion, therefore not stated. Example P-558.ZCL: Sinusoidal operation with 10 µm at 10 Hz requires approximately 1.7 mA current.

Recommended controllers for CL versions:

Single-channel: E-500 modular piezo controller system with E-505 amplifier module (high-power) and E-509 controller
Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board

 

Recommended controllers for CD versions:

E-610 piezo amplifier / servo controller, 1 channel
E-625 piezo servo controller, 1 channel
Single-channel digital controller: E-753 (bench-top)

Ask about custom designs!

Drawings / Images

PI P-518 Drawing

Order Information

P-558.ZCDPrecision Nanopositioning Z Stage, 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-558.ZCLPrecision Nanopositioning Z Stage, 50 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-518.ZCDPrecision Nanopositioning Z Stage, 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-518.ZCLPrecision Nanopositioning Z Stage, 100 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-528.ZCDPrecision Nanopositioning Z Stage, 200 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-528.ZCLPrecision Nanopositioning Z Stage, 200 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-558.TCDPrecision Nanopositioning Z/Tip/Tilt Stage, 50 µm, 0.6 mrad, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)

P-518.TCDPrecision Nanopositioning Z/Tip/Tilt Stage, 100 µm, 1.4 mrad, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)

P-528.TCDPrecision Nanopositioning Z/Tip/Tilt Stage, 200 µm, 2.4 mrad, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)


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Controllers / Drivers / Amplifiers

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Articles and Links

Downloads

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pdf 708 kB 1.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ82E
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pdf 0.9 MB 3.0.0 EN