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P-541.2 • P-542.2 XY Piezo Stage

Low-Profile XY Nanopositioning System with Large Aperture

PI P-541.SL
    • Low profile for easy integration: 16.5 mm
    • Clear aperture 80 mm × 80 mm
    • Travel range to 200 µm × 200 µm
    • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
    • High-dynamics direct-drive version
    • Choice of sensors: Strain gauge (lower cost) or capacitive sensors (higher performance)
    • Outstanding lifetime due to PICMA® piezo actuators
    • Combination with long-travel microscopy stages for longer stroke

Specifications

P-541.2CD /P-541.2CL

P-542.2CD /P-542.2CL

P-541.2DD

P-541.2SL

P-542.2SL

P-541.20L

P-542.20L

Unit

Tolerance

Active axes

X, Y

X, Y

X, Y

X, Y

X, Y

X, Y

X, Y

 

 

Motion and positioning

 

 

 

 

 

 

 

 

 

Integrated sensor

Capacitive

Capacitive

Capacitive

SGS

SGS

 

 

Open-loop travel, -20 to +120 V

150 µm × 150 µm

250 µm × 250 µm

60 µm × 60 µm

150 µm × 150 µm

250 µm × 250 µm

150 µm × 150 µm

250 µm × 250 µm

min. (20 % / -0 %)

Closed-loop travel

100 µm × 100 µm

200 µm × 200 µm

45 µm × 45 µm

100 µm × 100 µm

200 µm × 200 µm

 

Closed-loop / open-loop resolution

0.2 / 0.3

0.4 / 0.7

0.1 / 0.3

0.2 / 2.5

0.4 / 4

0.2 / –

0.4 / –

nm

typ.

Linearity error

0.03

0.03

0.03*

0.2

0.2

%

typ.

Repeatability

<5

<5

<5

<10

<10

nm

typ.

Pitch

<5

<5

<3

<5

<5

<5

<5

µrad

typ.

Yaw

<10

<10

<3

<10

<10

<10

<10

µrad

typ.

Mechanical properties

 

 

 

 

 

 

 

 

 

Stiffness in motion direction

0.47

0.4

10

0.47

0.4

0.47

0.4

N/µm

±20 %

Resonant frequency, no load

255

230

1550

255

230

255

230

Hz

±20 %

Resonant frequency, under load, at 100 g

200

190

200

190

200

190

Hz

±20 %

Resonant frequency, under load, at 200 g

180

1230

180

180

Hz

±20 %

Resonant frequency, under load, at 300 g

150

145

150

145

150

145

Hz

±20 %

Push / pull force capacity in motion direction

100 / 30

100 / 30

100 / 30

100 / 30

100 / 30

100 / 30

100 / 30

N

max.

Load capacity

20

20

20

20

20

20

20

N

max.

Drive properties

 

 

 

 

 

 

 

 

 

Piezo ceramic

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

 

 

Electrical capacitance per axis

4.2

7.5

9

4.2

7.5

4.2

7.5

µF

±20 %

Dynamic operating current coefficient per axis

5.2

4.8

25

5.2

4.8

5.2

4.8

µA / (Hz × µm)

±20 %

Miscellaneous

 

 

 

 

 

 

 

 

 

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

 

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

 

 

Mass

0.75

0.75

0.75

0.73

0.73

0.7

0.7

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor connection

Sub-D Special / LEMO

Sub-D Special / LEMO

Sub-D Special

LEMO

LEMO

 –

 

 

Voltage connection

Sub-D Special / LEMO

Sub-D Special / LEMO

Sub-D Special

LEMO

LEMO

LEMO

LEMO

 

 

* With digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 % typ.

Drawings / Images

PI P-54x.2 Drawing PI P-541.2DD Diagramm

Order Information

P-541.2DDXY Nanopositioning System with Large Aperture, High-Speed Direct Drive, 45 µm × 45 µm, Parallel Kinematics, Capacitive Sensors

P-541.2CDXY Nanopositioning System with Large Aperture, 100 µm × 100 µm, Parallel Kinematics, Capacitive Sensors

P-542.2CD / P-542.2CLXY Nanopositioning System with Large Aperture, 200 µm × 200 µm, Parallel Kinematics, Capacitive Sensors

P-541.2SLXY Nanopositioning System with Large Aperture, 100 µm × 100 µm, Strain Gauge Sensors

P-542.2SLXY Nanopositioning System with Large Aperture, 200 µm × 200 µm, Strain Gauge Sensors

P-541.20LXY Nanopositioning System with Large Aperture, 100 µm × 100 µm, Open-Loop

P-542.20LXY Nanopositioning System with Large Aperture, 200 µm × 200 µm, Open-Loop

Possible accessories

P-542.PD135 mm Petri Dish Holder for P-54x Nanopositioning Systems

P-542.SH1Microscope Slide Holder for P-54x Nanopositioning Systems

 

 

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Controllers / Drivers / Amplifiers

Accessories

Downloads

fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 708 kB 1.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ244E
P-541, P-542 XY Nanopositioning Systems with Large Clear Aperture
pdf 687 kB 1.0.0 EN
fileadmin/images/filelist/pdf.png Overview Microscopy Accessories EN
pdf 39 kB