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P-541.Z Piezo Z and Z / Tip / Tilt Stages

Low Profile, Large Aperture

PI P-541.ZSL
    • Low profile for easy integration: 16.5 mm
    • Clear aperture 80 mm × 80 mm
    • Vertical and Z / Tip / Tilt Stages
    • Travel range 100 µm
    • 1 mrad tilt
    • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
    • Choice of sensors: Strain gauge (lower cost) or capacitive sensors (higher performance)
    • Outstanding lifetime due to PICMA® piezo actuators
    • Combination with long-travel microscopy stages

System properties

System configuration: P-541.ZCD and E-500 modular system with E-503 amplifier and E-509.C1A controller; 20 g load
Small signal bandwidth: 60 Hz
Settling time (10 % step width): 9 ms

Specifications

P-541.ZCD

P-541.TCD*

P-541.ZSL

P-541.TSL*

P-541.Z0L

P-541.T0L*

Unit

Tolerance

Active axes

Z

Z, θX, θY

Z

Z, θX, θY

Z

Z, θX, θY

Motion and
positioning

Integrated sensor

Capacitive

Capacitive

SGS

SGS

Open-loop

Open-loop

Open-loop Z-travel,
-20 to 120 V

150

150

150

150

150

150

µm

min. (20 % /
-0 %)

Open-loop tip / tilt
angle in θX, θY at
-20 to 120 V

±0.6

±0.6

±0.6

mrad

min. (20 % /
-0 %) 

Closed-loop
Z-travel

100

100

100

100

µm

Closed-loop tip / tilt
angle in θX, θY

±0.4

-

±0.4

mrad

Open-loop
Z-resolution

0.2

0.2

0.2

0.2

0.2

0.2

nm

typ.

Open-loop resolution
in θX, θY

0.02

0.02

0.02

µrad

typ.

Closed-loop
Z-resolution

0.5

0.5

2.5

2.5

nm

typ.

Closed-loop
resolution
in θX, θY

0.08

0.25

µrad

typ.

Linearity error
(Z-travel), θX, θY

0.03

0.03

0.2

0.2

%

typ.

Repeatability Z

<2

<2

<10

<10

nm

typ.

Repeatability θX, θY

0.01

0.05

µrad

typ.

Runout θX, θY
(motion in Z)

±15

±15

±15

±15

±15

±15

µrad

typ.

Mechanical
properties

Stiffness Z

0.8

0.8

0.8

0.8

0.8

0.8

N/µm

±20 %

Unloaded resonant
frequency (Z)

410

410

410

410

410

410

Hz

±20 %

Unloaded resonant
frequency θX, θY

330

330

330

Hz

±20 %

Resonant frequency
@ 200 g (Z)

250

250

250

250

250

250

Hz

±20 %

Resonant frequency
@ 200 g, θX, θY

270

270

270

Hz

±20 %

Push / pull force
capacity

50 / 20

50 / 20

50 / 20

50 / 20

50 / 20

50 / 20

N

max.

Drive properties

Ceramic type

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

Electrical capacitance

6.3

6.3

6.3

6.3

6.3

6.3

µF

±20 %

Dynamic operating
current coefficient

7.9

7.9

7.9

7.9

7.9

7.9

µA / (Hz × µm)

±20 %

Miscellaneous

Operating
temperature
range

20 to 80

20 to 80

20 to 80

20 to 80

20 to 80

20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Mass

750

750

730

730

700

700

g

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor connection

Sub-D Special

Sub-D Special

LEMO

3 × LEMO

Voltage connection

Sub-D Special

Sub-D Special

LEMO

3 × LEMO

LEMO

3 × LEMO

BestellNr und * checken (Mail SAr 9.1.2012)

* Parallel kinematics design; the maximum displacement for translation and tilt motion cannot be achieved at the same time
Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E -503 or E-710 controller.

Recommended controller / amplifier

Single-channel (1 per axis): E-610 servo-controller / amplifier, E-625 servo-controller, bench-top, E-621 controller module
Multi-channel: modular piezo controller system E-500 with amplifier module E-503 (three channels) or E-505 (1 per axis, high-power) and E-509 controller
Single-channel digital controller: E-753 (bench-top)
Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board

Drawings / Images

PI P-541.Z Drawing PI M-686.D64

Order Information

P-541.ZCDVertical Nanopositioning Stage with Large Aperture, 100 µm, Direct Metrology, Capacitive Sensors

P-541.TCDVertical Tip / Tilt Nanopositioning Stage with Large Aperture, 100 µm / 1 mrad, Parallel Metrology, Capacitive Sensors

P-541.ZSLVertical Nanopositioning Stage with Large Aperture, 100 µm, Strain Gauge Sensors

P-541.TSLVertical Tip / Tilt Nanopositioning Stage with Large Aperture, 100 µm, Strain Gauge Sensors


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Controllers / Drivers / Amplifiers

Related Products

Downloads

fileadmin/images/filelist/zip.png P-541.Z STEP
zip 704 kB
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 708 kB 1.0.0 DE / EN