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P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioning System for up to 6 Axes

PI P-563
    • Parallel kinematics / metrology for enhanced responsiveness and multi-axis precision
    • Travel ranges to 300 x 300 x 300 µm
    • Highest linearity and stability with capacitive sensors
    • Frictionless, high-precision flexure guiding system
    • Excellent scanning flatness
    • High-dynamics XYZ version available; custom versions to 6 degrees of freedom
    • Clear aperture 66 mm x 66 mm
    • Outstanding lifetime due to PICMA® piezo actuators
    • UHV versions to 10-9 hPa

 

Specifications

 

P-561.3CD
P-561.3CL

P-562.3CD
P-562.3CL

P-563.3CD
P-563.3CL

P-561.3DD

Unit

Tolerance

PIMars XYZ piezo-
nanopositioning system,
closed-loop travel

100 × 100 × 100

200 × 200 × 200

300 × 300 × 300

45 × 45 × 15,
direct drive

µm

 

Motion and positioning

 

 

 

 

 

 

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

 

 

Open-loop travel,
-20 to 120 V

150 × 150 × 150

300 × 300 × 300

340 × 340 × 340

58 × 58 × 18

µm

min. (+20% / -0%)

Open-loop resolution

0.2

0.4

0.5

0.1

nm

typ.

Closed-loop
resolution

0.8

1

2

0.2

nm

typ.

Linearity error

0.03

0.03

0.03

0.01*

%

typ.

Repeatability
in X / Y / Z

2 / 2 / 2

2 / 2 / 4

2 / 2 / 4

2 / 2 / 2

nm

typ.

Pitch in X, Y

±1

±2

±2

±3

µrad

typ.

Crosstalk
θX, θY
(motion in Z)

±15

±20

±25

±3

µrad

typ.

Yaw in X, Y

±6

±10

±10

±3

µrad

typ.

Flatness in X, Y

±15

±20

±25

±10

nm

typ.

Crosstalk
in X, Y
(motion in Z)

±30

±50

±50

±20

nm

typ.

Mechanical
properties

 

 

 

 

 

 

Unloaded
resonant
frequency
in X / Y / Z

190 / 190 / 380

160 / 160 / 315

140 / 140 / 250

920 / 920 / 1050

Hz

±20 %

Resonant frequency
at 100 g
in X / Y / Z

 -

145 / 145 / 275

120 / 120 / 215

860 / 860 / 950

Hz

±20 %

Resonant frequency
at 330 g
in X / Y / Z

140 / 140 / 300

130 / 130 / 195

110 / 110 / 170

500 / 500 / 470

Hz

±20 %

Push force capacity
in motion direction
in X / Y / Z

200 / 200 / 50

120 / 120 / 50

100 / 100 / 50

200 / 200 / 50

N

max.

Pull force capacity
in motion direction
in X / Y / Z

30 / 30 / 30

30 / 30 / 30

30 / 30 / 30

30 / 30 / 30

N

max.

Load capacity

50

50

50

50

N

max.

Drive
properties

 

 

 

 

 

 

Piezo ceramic

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885 in Z,
P-888 in XY

 

 

Electrical capacitance
in X / Y / Z

5.2 / 5.2 / 10.4

7.4 / 7.4 / 14.8

7.4 / 7.4 / 14.8

38 / 38 / 6

µF

±20 %

Dynamic
operating
current
coefficient (DOCC)
in X / Y / Z

6.5 / 6.5 / 13

4.6 / 4.6 / 9.25

3.1 / 3.1 / 6.1

106 / 106 / 50

µA /
(Hz × µm)

±20 %

Miscellaneous

 

 

 

 

 

 

Operating
temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

 

Material

Aluminum

Aluminum

Aluminum

Aluminum

 

 

Mass

1.45

1.45

1.45

1.55

kg

±5 %

Sensor /
voltage connection

CD version: Sub-D Special, 1.5 m cable

CL version: LEMO

 

 

The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise equivalent motion with E-725 / E-712 controller.
* With digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 % typ.
Super-invar and titanium versions available.

Ask about custom designs!

Drawings / Images

PI P-562.6CD Drawing PI P-562.3CD Diagramm

Order Information

P-561.3CDPIMars XYZ Nanopositioning System with Large Travel Range, 100 µm × 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-561.3CLPIMars XYZ Nanopositioning System with Large Travel Range, 100 µm × 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

P-561.3DDPIMars High-Dynamics XYZ Nanopositioning System, 45 µm × 45 µm × 15 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s), Direct Drive

P-562.3CDPIMars XYZ Nanopositioning System with Large Travel Range, 200 µm × 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-562.3CLPIMars XYZ Nanopositioning System with Large Travel Range, 200 µm × 200 µm × 200 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

P-563.3CDPIMars XYZ Nanopositioning System with Large Travel Range, 300 µm × 300 µm × 300 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-563.3CLPIMars XYZ Nanopositioning System with Large Travel Range, 300 µm × 300 µm × 300 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)


Ask about custom designs!

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Controllers / Drivers / Amplifiers

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Articles and Links

Downloads

fileadmin/images/filelist/zip.png P-56x STEP
zip 2.6 MB
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 708 kB 1.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ248E
P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems
pdf 0.9 MB 1.0.0 EN