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P-587 6-Axis Precision Piezo Stage

Long Scanning Range, Direct Position Measurement

PI P-587
    • For scanning and positioning in X, Y, Z, θX, θY, θZ
    • 800 µm × 800 µm × 200 µm linear range
    • Up to 1 mrad rotational angle
    • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
    • Direct metrology with capacitive sensors for highest linearity
    • Outstanding lifetime due to PICMA® piezo actuators
    • Frictionless, high-precision flexure guiding system
    • Active trajectory control in all 6 degrees of freedom

Specifications

P-587.6CD

Unit

Tolerance

Active axes

X, Y, Z, θX, θY, θZ

Motion and positioning

Integrated sensor

Capacitive

Closed-loop travel in X, Y

800

µm

Closed-loop travel in Z

200

µm

Closed-loop tilt angle in θX, θY

±0.5

mrad

Closed-loop tilt angle in θZ

±0.5

mrad

Open-loop / closed-loop resolution X, Y

0.9 / 2.2

nm

typ.

Open-loop / closed-loop resolution Z

0.4 / 0.7

nm

typ.

Open-loop / closed-loop resolution in θX, θY

0.05 / 0.1

µrad

typ.

Open-loop / closed-loop resolution in θZ

0.1 / 0.3

µrad

typ.

Linearity error in X, Y, Z

0.01

%

typ.

Linearity error θX, θY, θZ

0.1

%

typ.

Repeatability X, Y

±3

nm

typ.

Repeatability in Z

±2

nm

typ.

Repeatability in θX, θY

±0.1

µrad

typ.

Repeatability in θZ

±0.15

µrad

typ.

Flatness

<15

nm

typ.

Stiffness in X / Y / Z

0.55 / 0.55 / 1.35

N / µm

Unloaded resonant frequency in X / Y / Z

103 / 103 / 235

Hz

±20 %

Resonant frequency at 500 g in X / Y / Z

88 / 88 / 175

Hz

±20 %

Resonant frequency at 2000 g in X / Y / Z

65 / 65 / 118

Hz

±20 %

Push / pull force capacity in motion direction

50 / 10

N

max.

Drive properties

Ceramic type

PICMA®

Electrical capacitance in X / Y / Z

81 / 81 / 18.4

µF

±20 %

Dynamic operating current coefficient (DOCC) in X, Y, θZ

12.6

µA/(Hz × µm)

±20 %

Dynamic operating current coefficient (DOCC) in Z, θX, θY

11.5

µA/(Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

°C

Material

Aluminum

Dimensions

240 mm × 240 mm × 50 mm

Mass

7.2

kg

±5 %

Cable length

1.5

m

±10 mm

Sensor / voltage connection

2 × Sub-D Special

Recommended controller / amplifier

E-712.6CD digital controller

The maximum rotational angle in θZ is 8 mrad, the tilt angles around X and Y rate 3 mrad.
Due to the parallel kinematics design, linear motion in X or Y is not possible simultaneously when the stage is in extreme tilt angle position.

Drawings / Images

PI P-587 Drawing

Order Information

P-587.6CD6-Axis Nanopositioning System with Long Travel Range, 800 µm × 800 µm ×200 µm, ±0.5 mrad, Parallel Metrology, Capacitive Sensors

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Controllers / Drivers / Amplifiers

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ251E
P-587.6CD 6-Axis Nanopositioning System with Capacitive Sensors
pdf 720 kB 1.0.0 EN