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P-602 PiezoMove High-Stiffness Linear Piezo Actuator

With Flexure Guided Motion Amplifier for Travel Ranges to 1 mm

PI P-602.8SL
    • Flexure guides for linear motion with minimum tip and tilt
    • Travel ranges to 1 mm
    • Forces to 100 N
    • Stiff and backlash-free construction
    • Available with integrated position sensor
    • Outstanding lifetime due to PICMA® piezo actuators
    • Ideal OEM actuator for force generation in adaptive systems technology, for nanoimprint processes or machine tools
    • Custom designs with larger travel or faster response and non-magnetic versions feasible

Precision-Classpiezo Linear Actuator

Frictionless flexure-guided design minimizes tilting and low lateral offset. Integrated motion amplifier. High stiffness

PICMA® High-Performance Piezo Drive

Piezoceramic actuators with all-ceramic insulation. Longer lifetime, humidity resistance and operating temperatures to 80 °C. The high-stiffness versions use 10 mm × 10 mm cross section PICMA® piezo ceramics actuators

Position Sensor Option for Closed-Loop Operation

Strain gauge sensor made of metal foil: Compact and with a non-linearity to 0.5 % for high position stability and repeatability. Indirect position measurement

Fields of Application

Research and industry. Ideal OEM actuator for force generation in adaptive systems technology, for nanoimprint processes or machine tools

Specifications

P-602.100 /
P-602.1S0 /
P-602.1SL

P-602.300 /
P-602.3S0 /

P-602.3SL

P-602.500 /
P-602.5S0 /
P-602.5SL

P-602.108 /
P-602.1S8 /
P-602.1L8

P-602.308 /
P-602.3S8 /
P-602.3L8

P-602.508 /
P-602.5S8 /

P-602.5L8

P-602.800 /
P-602.8S0 /

P-602.8SL

Unit

Active axes

X

X

X

X

X

X

X

Motion and positioning

Integrated sensor

– /
SGS /
SGS

– /
SGS /
SGS

– /
SGS /
SGS

– /
SGS /
SGS

– /
SGS /
SGS

– /
SGS /
SGS

– /
SGS /
SGS

Open-loop travel, -20 to 120 V

120

300

600

100

300

500

1000

µm

Closed-loop travel

– / 100 / 100

– / 300 / 300

– / 500 / 500

– / 100 / 100

– / 300 / 300

– / 500 / 500

– / 1000 / 1000

µm

Open-loop resolution

0.2

0.3

0.4

0.2

0.3

0.4

0.5

nm

Closed-loop resolution

– / 2 / 2

– / 3 / 3

– / 3 / 3

– / 2 / 2

– / 3 / 3

– / 3 / 3

– / 7 / 7

nm

Closed-loop non-linearity

– / 0.5 / 0.5

– / 0.5 / 0.5

– / 0.5 / 0.5

– / 0.5 / 0.5

– / 0.5 / 0.5

– / 0.5 / 0.5

– / 1.5 / 1.5

%

Repeatability

– / 10 / 10

– / 20 / 20

– / 35 / 35

– / 10 / 10

– / 20 / 20

– / 35 / 35

– / 60 / 60

nm

Mechanical properties

Stiffness in motion direction

0.8

0.35

0.3

2.3

0.75

0.65

0.4

N/µm

Unloaded resonant frequency

1000

450

230

1000

450

230

150

Hz

Push force capacity in motion direction

100

100

100

100

100

100

100

N

Pull force capacity in motion direction

5

5

5

5

5

5

5

N

Drive properties

Piezoceramics

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-888

PICMA®
P-888

PICMA®
P-888

PICMA®
P-888

Electrical capacitance

1.5

3.1

6.2

6

13

26

39

µF

Dynamic operating current coefficient

1.9

1.3

1.6

7.5

5

6

4

µA / (Hz × µm)

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Stainless steel

Stainless steel

Stainless steel

Stainless steel

Stainless steel

Stainless steel

Stainless steel

Dimensions

28 mm × 17 mm × 9 mm

46 mm × 19 mm × 9 mm

8 mm × 26 mm × 9 mm

28 mm × 22 mm × 14 mm

46 mm × 24 mm × 14 mm

85 mm × 31 mm × 14 mm

126 mm × 34 mm × 14 mm

Mass

0.02

0.04

0.105

0.05

0.088

0.215

0.355

kg

Cable length

0.5 / 0.5 / 2

0.5 / 0.5 / 2

0.5 / 0.5 / 2

0.5 / 0.5 / 2

0.5 / 0.5 / 2

0.5 / 0.5 / 2

0.5 / 0.5 / 2

m

Power / sensor connector

Wire leads / Wire leads / LEMO

Wire leads / Wire leads / LEMO

Wire leads / Wire leads / LEMO

Wire leads / Wire leads / LEMO

Wire leads / Wire leads / LEMO

Wire leads / Wire leads / LEMO

Wire leads / Wire leads / LEMO

Recommended controller / amplifier

Without sensor:

E-610.00 amplifier

E-831 OEM amplifier module

With sensor:

E-610.S0 controller

E-625.SR controller, bench-top device

E-709.SRG controller, bench-top device with digital linearization 

Ask about custom designs!

Drawings / Images

PI P-602 Drawing PI P-602 Drawing

Order Information

P-602.100PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 100 µm, Open-Loop

P-602.1S0PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 100 µm, SGS Sensor

P-602.1SLPiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 100 µm, SGS Sensor, LEMO Connector(s)

P-602.108PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 100 µm, Open-Loop

P-602.1S8PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 100 µm, SGS Sensor

P-602.1L8PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 100 µm, SGS Sensor, LEMO Connector(s)

P-602.300PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 300 µm, Open-Loop

P-602.3S0PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 300 µm, SGS Sensor

P-602.3SLPiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 300 µm, SGS Sensor, LEMO Connector(s)

P-602.308PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 300 µm, Open-Loop

P-602.3S8PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 300 µm, SGS Sensor

P-602.3L8PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 300 µm, SGS Sensor, LEMO Connector(s)

P-602.500PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 500 µm, Open-Loop

P-602.5S0PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 500 µm, SGS Sensor

P-602.5SLPiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 500 µm, SGS Sensor, LEMO Connector(s)

P-602.508PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 500 µm, Open-Loop

P-602.5S8PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 500 µm, SGS Sensor

P-602.5L8PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Force, 500 µm, SGS Sensor, LEMO Connector(s)

P-602.800PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 1000 µm, Open-Loop

P-602.8S0PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 1000 µm, SGS Sensor

P-602.8SLPiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, High Stiffness, 1000 µm, SGS Sensor, LEMO Connector(s)

Ask about custom designs!

 

 

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Accessories

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Technology

Downloads

fileadmin/images/filelist/pdf.png PI Datasheet P-602
PiezoMove High-Stiffness Linear Piezo Actuator With Flexure Guided Motion Amplifier for Travel Ranges to 1 mm
PDF 797 K
fileadmin/images/filelist/pdf.png Technical Note P602T0001
P-602 PiezoMove OEM Flexure-Guided, Lever-Amplified Actuators
PDF 537 K 2016-04-01 EN
fileadmin/images/filelist/zip.png P-602 STEP
ZIP 2.4 M