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P-611.3 NanoCube® XYZ Piezo Stage

Compact Multi-Axis Piezo System for Nanopositioning and Fiber Alignment

PI P-611.3S
    • Travel range to 120 µm × 120 µm × 120 µm
    • Ultra-compact: 44 mm × 44 mm × 44 mm
    • Resolution to 0.2 nm
    • Rapid response
    • Frictionless, high-precision flexure guiding system
    • Outstanding lifetime due to PICMA® piezo actuators
    • For fast scanning
    • Version with integrated fiber adapter interface
    • Especially cost-effective systems

Specifications

P-611.3S
P-611.3SF

P-611.3O
P-611.3OF

Unit

Tolerance

Active axes

X, Y, Z

X, Y, Z

Motion and positioning

Integrated sensor

SGS

Open-loop travel, -20 to 120 V

120 / axis

120 / axis

µm

min. (20 % /
-0%)

Closed-loop travel

100 / axis

µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

1

nm

typ.

Linearity error

0.1

%

typ.

Repeatability

<10

nm

typ.

Pitch in X, Y

±5

±5

µrad

typ.

Runout θX (motion in Z)

±10

±10

µrad

typ.

Yaw in X

±20

±20

µrad

typ.

Yaw in Y

±10

±10

µrad

typ.

Runout θY (motion in Z)

±10

±10

µrad

typ.

Mechanical properties

Stiffness

0.3

0.3

N/µm

±20 %

Unloaded resonant
frequency X / Y / Z

350 / 220 / 250

350 / 220 / 250

Hz

±20 %

Resonant frequency
at 30 g in X / Y / Z

270 / 185 / 230

270 / 185 / 230

Hz

±20 %

Resonant frequency
at 100 g in X / Y / Z

180 / 135 / 200

180 / 135 / 200

Hz

±20 %

Push / pull force capacity
in motion direction

15 / -10

15 / -10

N

max.

Load capacity

15

15

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

1.5

µF

±20 %

Dynamic operating current coefficient

1.9

1.9

µA/(Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum, steel

Aluminum, steel

Dimensions

44 mm × 44 mm × 43.2 mm
SF version: 44 mm × 50 mm × 44.2 mm

44 mm × 44 mm × 43.2 mm
OF version: 44 mm × 50 mm × 44.2 mm

Mass

0.32

0.32

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

Sub-D connector

Voltage connection

Sub-D connector

Sub-D connector

Recommended controller / amplifier

E-664 NanoCube® Controller

3 × E-610.00F OEM amplifier modules;
E-663 3-channel amplifier, bench-top

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value is given noise equivalent motion with E-503 amplifier.
Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 0.8 mA drive current.
Adapter cable with LEMO connectors for sensor and operating voltage available.

Ask about custom designs!

Drawings / Images

PI P-611.3 Drawing

Order Information

P-611.3SNanoCube® XYZ Nanopositioning System, 100 µm ×100 µm × 100 µm, Strain Gauge Sensors

P-611.3ONanoCube® XYZ Nanopositioning System, 100 µm × 100 µm ×100 µm, Open-Loop

P-611.3SFNanoCube® XYZ Nanopositioning System, 100 µm ×100 µm × 100 µm, Strain Gauge Sensors, Fiber Adapter Interface

P-611.3OFNanoCube® XYZ Nanopositioning System, 100 µm × 100 µm ×100 µm, Open-Loop, Fiber Adapter Interface


Ask about custom designs!

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Controllers / Drivers / Amplifiers

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Articles and Links

Downloads

fileadmin/images/filelist/zip.png P-611.3 STEP
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