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P-611.XZ • P-611.2 XZ & XY Nanopositioner

Compact 2-Axis Piezo System for Nanopositioning Tasks

PI P-611.XZS
    • Compact: Footprint 44 mm × 44 mm
    • Travel range to 120 µm × 120 µm
    • Resolution to 0.2 nm
    • Cost-effective mechanics / electronics system configurations
    • Frictionless, high-precision flexure guiding system
    • Outstanding lifetime due to PICMA® piezo actuators
    • X, Z and XYZ version available

Specifications

P-611.2S

P-611.20

P-611.XZS

P-611.XZ0

Unit

Tolerance

Active axes

X, Y

X, Y

X, Z

X, Z

Motion and positioning

Integrated sensor

SGS

SGS

Open-loop travel, -20 to 120 V

120

120

120

120

µm

min. (20 % / -0 %)

Closed-loop travel

100

100

µm

Open-loop resolution

0.2

0.2

0.2

0.2

nm

typ.

Closed-loop resolution

2

2

nm

typ.

Linearity error

0.1

0.1

%

typ.

Repeatability

<10

<10

nm

typ.

Pitch in X, Y

±5

±5

±5

±5

µrad

typ.

Runout θX (motion in Z)

±10

±10

µrad

typ.

Yaw in X

±20

±20

±20

±20

µrad

typ.

Yaw in Y

±10

±10

µrad

typ.

Runout θY (motion in Z)

±10

±10

µrad

typ.

Mechanical properties

Stiffness

0.2

0.2

0.2Z: 0.35

0.2Z: 0.35

N/µm

±20 %

Resonant frequency, no load

X: 345;
Y: 270

X: 345;
Y: 270

X: 365;
Z: 340

X: 365;
Z: 340

Hz

±20 %

Resonant frequency, under load, at 30 g

X: 270;
Y: 225

X: 270;
Y: 225

X: 280;
Z: 295

X: 280;
Z: 295

Hz

±20 %

Resonant frequency, under load, at 100 g

X: 180;
Y: 165

X: 180;
Y: 165

X: 185;
Z: 230

X: 185;
Z: 230

Hz

±20 %

Push / pull force capacity in motion direction

15 / 10

15 / 10

15 / 10

15 / 10

N

max.

Load capacity

15

15

15

15

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

1.5

1.5

1.5

µF

±20 %

Dynamic operating current coefficient

1.9

1.9

1.9

1.9

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Aluminum, steel

Dimensions

44 mm × 44 mm × 25 mm

44 mm × 44 mm × 25 mm

44 mm × 44 mm × 34 mm

44 mm × 44 mm × 34 mm

Mass

0.235

0.235

0.27

0.27

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

m

±10 mm

Sensor connection

LEMO

LEMO

Voltage connection

LEMO

LEMO

LEMO

LEMO

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value is given noise equivalent motion with E-503 amplifier.
Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 0.9 mA drive current.

Recommended controller / amplifier

Single-channel (1 per axis): E-610 servo-controller / amplifier, E-625 servo-controller, bench-top, E-621 controller module
Multi-channel: modular piezo controller system E-500 with amplifier module E-503 (three channels) or E-505 (1 per axis, high-power) and E-509 controller

Drawings / Images

PI P-611.XZS Drawing PI P-611.2S Drawing

Order Information

P-611.2SXY Nanopositioning System, 100 µm × 100 µm, SGS Sensor

P-611.20XY Nanopositioning System, 100 µm × 100 µm, Open-Loop

P-611.XZSXZ Nanopositioning System, 100 µm ×100 µm, SGS Sensor

P-611.XZ0XZ Nanopositioning System, 100 µm ×100 µm, Open-Loop

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Controllers / Drivers / Amplifiers

Downloads

fileadmin/images/filelist/zip.png P-611.XZ P-611.2 STEP
zip 370 kB