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P-611.Z Piezo Z Stage

Compact Nanopositioner

PI P-611.Z
    • Compact: Footprint only 44 mm × 44 mm
    • Travel range 100 µm
    • Resolution to 0.2 nm
    • Cost-effective mechanics / electronics system configurations
    • Frictionless, high-precision flexure guiding system
    • Outstanding lifetime due to PICMA® piezo actuators
    • X, XY, XZ and XYZ versions

Specifications

P-611.ZS

P-611.Z0

Unit

Tolerance

Active axes

Z

Z

Motion and positioning

Integrated sensor

SGS

-

Open-loop travel, -20 to +120 V

120

120

µm

min. (20 % / -0 %)

Closed-loop travel

100

-

µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

2

-

nm

typ.

Linearity error

0.1

-

%

typ.

Repeatability

<10

-

nm

typ.

Runout θZ (Z motion)

±5

±5

µrad

typ.

Runout θX (Z motion)

±20

±20

µrad

typ.

Runout θY (Z motion)

±5

±5

µrad

typ.

Mechanical properties

Stiffness

0.45

0.45

N/µm

±20 %

Unloaded resonant frequency

460

460

Hz

±20 %

Resonant frequency @ 30 g

375

375

Hz

±20 %

Resonant frequency @ 100 g

265

265

Hz

±20 %

Push / pull force capacity

15 / 10

15 / 10

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

1.5

µF

±20 %

Dynamic operating current coefficient

1.9

1.9

µA/(Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum, steel

Aluminum, steel

Dimensions

44 mm × 44 mm × 27 mm

44 mm × 44 mm × 27 mm

Mass

176

176

g

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

LEMO

LEMO

Voltage connection

LEMO

LEMO

Drawings / Images

PI P-611.ZS Drawing PI P-611.Z Diagramm

Order Information

P-611.Z0Vertical Nanopositioning Stage, 120 µm, Open-Loop

P-611.ZSVertical Nanopositioning Stage, 100 µm, SGS Sensor


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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ253
P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor
PDF 1.3 M 1.0.0 EN
fileadmin/images/filelist/pdf.png Technical Note P611T0006
Unpacking and Handling of P-611 Nanopositioning Systems
PDF 162 K 2014-07-29 EN
fileadmin/images/filelist/pdf.png PI Datasheet P-611.Z
Piezo Z Stage Compact Nanopositioner
PDF 760 K
fileadmin/images/filelist/zip.png P-611.Z STEP
ZIP 200 K