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P-612.2 XY Piezo Nanopositioning System

Compact, Clear Aperture

PI P-612
    • Compact: Footprint 60 mm x 60 mm
    • 100 µm × 100 µm closed-loop travel range (130 µm × 130 µm, open-loop)
    • For cost-sensitive applications
    • Clear aperture 20 mm × 20 mm
    • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
    • Outstanding lifetime due to PICMA® piezo actuators
    • Available as compact version

Specifications

P-612.2SL

P-612.20L

Unit

Tolerance

Active axes

X, Y

X, Y

Motion and positioning

Integrated sensor

SGS

-

Open-loop travel, -20 to +120 V

130

130

µm

min. (20 % / -0 %)

Closed-loop travel

100

-

µm

Open-loop resolution

0.8

0.8

nm

typ.

Closed-loop resolution

5

-

nm

typ.

Linearity error

0.4

-

%

typ.

Repeatability

<10

-

nm

typ.

Pitch

±10

±10

µrad

typ.

Yaw in X / Y

±10 / ±50

±10 / ±50

µrad

typ.

Mechanical properties

Stiffness

0.15

0.15

N/µm

±20 %

Unloaded resonant frequency

400

400

Hz

±20 %

Resonant frequency @ 100 g

200

200

Hz

±20 %

Push / pull force capacity in motion direction

15 / 5

15 / 5

N

max.

Load capacity

15

15

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

1.5

µF

±20 %

Dynamic operating current coefficient

1.9

1.9

µA/(Hzxµm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum, steel

Aluminum, steel

Mass

105

105

g

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

LEMO connector

-

Voltage connection

LEMO connector

LEMO connector

E-Mail BSc 4.11.2011 nm statt µm

Resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

Recommended controllers

Single-channel (1 per axis): E-610 servo-controller / amplifier, E-625 servo-controller, bench-top, E-621 controller module

Multi-channel: modular piezo controller system E-500 with amplifier module E-503 (three channels) or E-505 (1 per axis, high-power) and E-509 controller

Drawings / Images

PI P-612.2 Drawing

Order Information

P-612.20LXY Nanopositioning System with Aperture 20 mm × 20 mm, 100 µm × 100 µm, Open-Loop

P-612.2SLXY Nanopositioning System with 20 mm × 20 mm Aperture, 100 µm × 100 µm, Strain Gauge Sensors


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