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P-612.Z Piezo Z Stage

Compact Nanopositioning Stage with Aperture

PI P-612.Z
    • Travel range 100 µm
    • Resolution to 0.2 nm
    • Linearity error 0.2 %
    • Compact: Footprint 60 mm x 60 mm
    • Very cost-effective controller / piezomechanics systems
    • Frictionless, high-precision flexure guiding system
    • Outstanding lifetime due to PICMA® piezo actuators

Specifications

P-612.ZSL

P-612.Z0L

Unit

Tolerance

Active axes

Z

Z

Motion and positioning

Integrated sensor

SGS

-

Open-loop travel, -20 to +120 V

110

110

µm

min. (20 % / -0 %)

Closed-loop travel

100

-

µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

1.5

-

nm

typ.

Closed-loop linearity error

0.2

-

%

typ.

Repeatability

±4

-

nm

typ.

Runout θX, θY

±10

±10

µrad

typ.

Crosstalk in X, Y

±20

±20

µm

nm (Mail BSc 4. Nov. 2011)

typ.

Mechanical properties

Stiffness in motion direction

0.63

0.63

N/µm

±20 %

Unloaded resonant frequency

490

490

Hz

±20 %

Resonant frequency under load

420 (30 g)

420 (30 g)

Hz

±20 %

Load capacity

15 / 10

15 / 10

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

3

3

µF

±20 %

Dynamic operating current coefficient

3.8

3.8

µA/(Hzxµm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Mass

0.28

0.275

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor / voltage connection

LEMO

LEMO (no sensor)

s. Mail BSc, 4.11.2011 nm statt µm

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

Recommended controller / amplifier

E-610 servo controller / amplifier, E-625 servo controller (bench-top), E-665 powerful servo controller (bench-top) , E-660 bench-top for open-loop systems

Drawings / Images

PI P-612.Z Drawing PI P-612.ZSL Diagramm

Order Information

P-612.Z0LVertical Nanopositioning Stage, 100 µm, 20 mm × 20 mm Aperture, Open-Loop

P-612.ZSLVertical Nanopositioning Stage, 100 µm, 20 mm × 20 mm Aperture, SGS Sensor


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