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This product has been replaced by the following new product: P-620.2 – P-629.2 PIHera XY Piezo Stage

P-615 NanoCube® XYZ Piezo System

Long-Travel Multi-Axis Piezo Stage for Precision Alignment Applications

PI P-615
    • Travel range to 420 µm × 420 µm × 300 µm
    • Resolution 1 nm
    • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
    • Clear aperture Ø 10 mm, ideal for alignment and photonics packaging applications
    • Outstanding lifetime due to PICMA® piezo actuators
    • Versions with and without sensor
    • Vacuum-compatible versions to 10-9 hPa
    • Frictionless, high-precision flexure guiding system

Specifications

P-615.3CD
P-615.3CL

P-615.30L

Unit

Tolerance

Active axes

X, Y, Z

X, Y, Z

Motion and positioning

Integrated sensor

Capacitive

Open-loop travel in X / Y / Z, -20 to 120 V

420 / 420 / 300

420 / 420 / 300

µm

min. (20 % /
-0)

Closed-loop travel in X / Y / Z

350 / 350 / 250

µm

Open-loop resolution in X / Y / Z

0.5

0.5

nm

typ.

Closed-loop resolution X / Y / Z

1

nm

typ.

Linearity error in X / Y / Z

0.02

%

typ.

Repeatability in X / Y / Z

±7.5 / ±7.5 / ±5

nm

typ.

Pitch in X, Y

100

100

µrad

typ.

Yaw in X, Y

50

50

µrad

typ.

Runout θX, θY (motion in Z)

10

10

µrad

typ.

Mechanical properties

Stiffness in X / Y / Z

0.13 / 0.13 / 0.35

0.13 / 0.13 / 0.35

N/µm

±20 %

Unloaded resonant frequency in X / Y / Z

210 / 210 / 250

210 / 210 / 250

Hz

±20 %

Resonant frequency at 100 g in X / Y / Z

125 / 125 / 200

125 / 125 / 200

Hz

±20 %

Push / pull force capacity in motion direction

20 / 10

20 / 10

N

max.

Load capacity

20

20

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance in X / Y / Z

3.7 / 3.7 / 6.2

3.7 / 3.7 / 6.2

µF

±20 %

Dynamic operating current coefficient
(DOCC) in X / Y / Z

1.3 / 1.3 / 3.1

1.3 / 1.3 / 3.1

µA/(Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Mass

0.58

0.57

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor / voltage connection

Sub-D Special (CD version);
LEMO (CL version)

LEMO (no sensor)

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-503 amplifier.

Recommended controllers

Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board
Multi-channel: E-500 modular piezo controller system with E-503 amplifier module (three channels) or E-505 (1 per axis, high-power) and E-509 controller (optional)
P-615.30L: E-610 controller / amplifier (1 per axis)

Drawings / Images

PI P-615 Drawing PI P-615 Diagramm

Order Information

P-615.3CDNanoCube® XYZ Nanopositioning System with Long Travel Range, 350 µm × 350 µm × 250 µm, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s)

P-615.3CLNanoCube® XYZ Nanopositioning System with Long Travel Range, 350 µm × 350 µm × 250 µm, Parallel Metrology, Capacitive Sensors, LEMO Connector(s)

P-615.30LNanoCube® XYZ Nanopositioning System with Long Travel Range, 420 µm × 420 µm × 300 µm, Parallel Metrology, Open-Loop, LEMO Connector(s)

P-615.3UDNanoCube® XYZ Nanopositioning System with Long Travel Range, 350 µm × 350 µm × 250 µm, Parallel Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

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Controllers / Drivers / Amplifiers

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