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P-620.1 – P-629.1 PIHera Piezo Linear Stage

Variable Travel Ranges and Axis Configuration

PI P-622.1CD
    • Travel ranges 50 to 1800 µm
    • Resolution to 0.1 nm
    • Positioniergenauigkeit 0.02 %
    • Direct metrology with capacitive sensors
    • X, XY, Z, XYZ versions

Specifications

P-620.1CD
P-620.1CL

P-621.1CD
P-621.1CL

P-622.1CD
P-622.1CL

P-625.1CD
P-625.1CL

P-628.1CD
P-628.1CL

P-629.1CD
P-629.1CL

Unit

Tolerance

Active axes

X

X

X

X

X

X

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

60

120

300

600

950

1800

µm

min. (20 % / -0 %)

Closed-loop travel

50

100

250

500

800

1500

µm

Closed-loop / open-loop resolution

0.2 / 0.1

0.4 / 0.2

0.7 / 0.4

1.4 / 0.5

1.8 / 0.5

3 / 2

nm

typ.

Closed-loop linearity error

0.02

0.02

0.02

0.03

0.03*

0.03**

%

typ.

Repeatability

±1

±1

±1

±5

±10

±14

nm

typ.

Pitch / yaw

±3

±3

±3

±6

±6

±30 / ±10

µrad

typ.

Mechanical properties

Stiffness in motion direction

0.42

0.35

0.2

0.1

0.12

0.13

N/µm

±20 %

Unloaded resonant frequency

1100

800

400

215

125

125

Hz

±20 %

Resonant frequency @ 20 g

550

520

340

180

115

120

Hz

±20 %

Resonant frequency @ 120 g

260

240

185

110

90

110

Hz

±20 %

Push / pull force capacity in motion direction

10

10

10

10

10

10

N

max.

Load capacity

10

10

10

10

10

10

N

max.

Lateral force

10

10

10

10

10

8

N

max.

Drive properties

Piezo ceramic

PICMA®
P-883

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-887

PICMA®
P-888

Electrical capacitance

0.35

1.5

3.1

6.2

19

52

µF

±20 %

Dynamic operating current coefficient

0.9

1.9

1.9

1.6

3

4.3

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Dimensions

30 mm × 30 mm × 12 mm

40 mm × 40 mm × 15 mm

50 mm × 50 mm × 15 mm

60 mm × 60 mm × 15 mm

80 mm × 80 mm × 17 mm

100 mm × 100 mm × 22.5 mm

Mass

0.11

0.16

0.2

0.24

0.38

0.72

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

CD versions: Sub-D special

CL versions: LEMO

Versions without sensor are available under the P-62x.10L ordering number; operating temperature range -20 to 150 °C. Sensor / voltage connection LEMO.
Vacuum versions to 10-9 hPa are available as P-62x.1UD.
The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given as noise with E-710 digital controller.
* With digital controller. With analog controllers 0.05 %
** With digital controller. With analog controllers 0.07 %

Recommended controller / amplifier (CD versions)

E-610 servo controller / amplifier , E-625 servo controller, bench-top, E-665 powerful servo controller, bench-top, E-753 single-channel digital controller, bench-top

Recommended controller / amplifier (CL versions)

E-500 modular piezo controller system with E-505 amplifier module (high performance) and E-509 controller

Recommended controller / amplifier (0L versions, open-loop)

E-500 modular piezo controller system with E-505 amplifier module (high performance)

Drawings / Images

PI P-621.1CD Diagramm

Order Information

P-620.1CDPrecise PIHera Linear Nanopositioning System, 50 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-620.1CLPrecise PIHera Linear Nanopositioning System, 50 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-620.10LPrecise PIHera Linear Nanopositioning System, 60 µm, Open-Loop, LEMO Connector(s)

P-620.1UDPrecise PIHera Linear Nanopositioning System, 50 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-621.1CDPrecise PIHera Linear Nanopositioning System, 100 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-621.1CLPrecise PIHera Linear Nanopositioning System, 100 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-621.10LPrecise PIHera Linear Nanopositioning System, 120 µm, Open-Loop, LEMO Connector(s)

P-621.1UDPrecise PIHera Linear Nanopositioning System, 100 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-622.1CDPrecise PIHera Linear Nanopositioning System, 250 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-622.1CLPrecise PIHera Linear Nanopositioning System, 250 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-622.10LPrecise PIHera Linear Nanopositioning System, 300 µm, Open-Loop, LEMO Connector(s)

P-622.1UDPrecise PIHera Linear Nanopositioning System, 250 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-625.1CDPrecise PIHera Linear Nanopositioning System, 500 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-625.1CLPrecise PIHera Linear Nanopositioning System, 500 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-625.10LPrecise PIHera Linear Nanopositioning System, 600 µm, Open-Loop, LEMO Connector(s)

P-625.1UDPrecise PIHera Linear Nanopositioning System, 500 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-628.1CDPrecise PIHera Linear Nanopositioning System, 800 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-628.1CLPrecise PIHera Linear Nanopositioning System, 800 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-628.10LPrecise PIHera Linear Nanopositioning System, 950 µm, Open-Loop, LEMO Connector(s)

P-628.1UDPrecise PIHera Linear Nanopositioning System, 800 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-629.1CDPIHera Linear Piezo Nanopositioning Stage, 1500 µm, Capacitive Sensor, Sub-D Connector(s)

P-629.1CLPIHera Linear Piezo Nanopositioning Stage, 1500 µm, Capacitive Sensor, LEMO Connector(s)

P-629.10LPrecise PIHera Linear Nanopositioning System, 1800 µm, Open-Loop, LEMO Connector(s)

P-629.1UDPIHera Linear Piezo Nanopositioning Stage, 1500 µm, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

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Controllers / Drivers / Amplifiers

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 664 kB 2.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ234E
P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
pdf 1.0 MB 1.0.1 EN
fileadmin/images/filelist/zip.png P-62x.1 STEP
zip 0.9 MB