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P-620.2 – P-629.2 PIHera XY Piezo Stage

High-Precision XY Nanopositioning Systems with Variable Travel Ranges

PI P-621.2
    • Travel ranges 50 to 1800 µm
    • Resolution to 0.1 nm
    • Positioning accuracy 0.02 %
    • Direct metrology with capacitive sensors
    • X, XY, Z, XYZ versions

Specifications

P-620.2CD
P-620.2CL

P-621.2CD
P-621.2CL

P-622.2CD
P-622.2CL

P-625.2CD
P-625.2CL

P-628.2CD
P-628.2CL

P-629.2CD
P-629.2CL

Unit

Tolerance

Active axes

X, Y

X, Y

X, Y

X, Y

X, Y

X, Y

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel X, Y, -20 to 120 V

60

120

300

600

950

1800

µm

min. (20% / -0%)

Closed-loop travel in X, Y

50

100

250

500

800

1500

µm

Open-loop resolution in X, Y

0.1

0.2

0.4

0.5

0.5

2

nm

typ.

Closed-loop resolution in X, Y

0.2

0.4

0.7

1.4

3.5

3.5

nm

typ.

Linearity error in X, Y

0.02

0.02

0.02

0.03

0.03*

0.03**

%

typ.

Repeatability X, Y

±2

±2

±2

±5

±10

±14

nm

typ.

Pitch / yaw

±3

±3

±3

±3 / ±5

±20 / ±5

±30 / ±5

µrad

typ.

Mechanical properties

Stiffness X, Y

0.22

0.25

0.2

0.1

0.05

0.1

N/µm

±20 %

Unloaded resonant frequency X

575

420

225

135

75

60

Hz

±20 %

Unloaded resonant frequency Y

800

535

300

195

105

100

Hz

±20 %

Loaded resonant frequency in X, 50 g

270

285

180

120

60

55

Hz

±20 %

Resonant frequency in Y @ 50 g

395

365

215

150

85

85

Hz

±20 %

Resonant frequency in X @ 100 g

285

220

160

105

55

50

Hz

±20 %

Loaded resonant frequency in Y @ 100 g

300

285

175

125

75

80

Hz

±20 %

Push / pull force capacity in motion direction

10 / 5

10 / 8

10 / 8

10 / 8

10 / 8

10 / 8

N

max.

Load capacity

10

10

10

10

10

10

N

max.

Lateral force

10

10

10

10

10

10

N

max.

Drive properties

Piezo ceramic

PICMA®
P-883

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-887

PICMA®
P-888

Electrical capacitance in X, Y

0.35

1.5

3.1

6.2

19

52

µF

±20 %

Dynamic operating current coefficient in X, Y

0.9

1.9

1.9

1.6

3

4.3

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Dimensions

30 mm × 30 mm × 21.5 mm

40 mm × 40 mm × 25 mm

50 mm × 50 mm × 25 mm

60 mm × 60 mm × 25 mm

80 mm × 80 mm × 25 mm

100 mm × 100 mm × 40 mm

Mass

0.195

0.295

0.348

0.43

0.7

1.37

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

CD versions: Sub-D special

CL versions: LEMO

Lower axis: X; upper axis: Y.
Versions without sensor are available under the P-62x.20L ordering number; operating temperature range -20 to 150 °C. Sensor / voltage connection LEMO
Vacuum versions to 10-9 hPa are available as P-62x.2UD.
The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given as noise with E-710 digital controller.
* With digital controller. With analog controllers 0.05 %
** With digital controller. With analog controllers 0.07 %

Recommended controller / amplifier (CD versions)

E-610 controller / amplifier, E-625 piezo controller (bench-top), E-665 powerful servo controller (bench-top), E-712 digital piezo controller (modular), E-725 multi-channel digital controller (bench-top), E-761 digital piezo controller (PCI board)

Recommended controller / amplifier (CL versions)

E-500 modular piezo controller system with E-505 amplifier module (1 per axis, high performance) and E-509 controller

Recommended controller / amplifier (0L versions, open-loop)

E-500 modular piezo controller system with E-505 amplifier module (1 per axis, high performance)

Drawings / Images

PI P-62x.2 Drawing

Order Information

P-620.2CDPrecise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-620.2CLPrecise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-621.20LPrecise PIHera XY Nanopositioning System, 60 µm × 60 µm, Open-Loop, LEMO Connector(s)

P-620.2UDPrecise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-621.2CDPrecise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-621.2CLPrecise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-621.20LPrecise PIHera XY Nanopositioning System, 120 µm × 120 µm, Open-Loop, LEMO Connector(s)

P-621.2UDPrecise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-622.2CDPrecise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-622.2CLPrecise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-622.20LPrecise PIHera XY Nanopositioning System, 300 µm × 300 µm, Open-Loop, LEMO Connector(s)

P-622.2UDPrecise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-625.2CDPrecise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-625.2CLPrecise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-625.20LPrecise PIHera XY Nanopositioning System, 600 µm × 600 µm, Open-Loop, LEMO Connector(s)

P-625.2UDPrecise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-628.2CDPrecise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)

P-628.2CLPrecise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)

P-628.20LPrecise PIHera XY Nanopositioning System, 1000 µm × 1000 µm, Open-Loop, LEMO Connector(s)

P-628.2UDPrecise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-629.2CDPIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub-D Connector(s)

P-629.2CLPIHera XY Piezo Nanopositioning Stage, 1500 µm × 1500 µm, Capacitive Sensors, LEMO Connector(s)

P-629.20LPrecise PIHera XY Nanopositioning System, 1800 µm × 1800 µm, Open-Loop, LEMO Connector(s)

P-629.2UDPIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

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Controllers / Drivers / Amplifiers

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 708 kB 1.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ234E
P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
pdf 1.0 MB 1.0.1 EN
fileadmin/images/filelist/zip.png P-62x.2 STEP
zip 1.0 MB