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P-620.Z – P-622.Z PIHera Precision Z-Stage

Variable Travel Ranges and Axis Configuration

PI P-62x.Z
    • Travel ranges 50 µm to 250 µm
      (400 µm open-loop)
    • Resolution to 0.1 nm
    • Positioning accuracy 0.02 %
    • Direct metrology with capacitive sensors
    • X, XY, Z, XYZ versions

Specifications

P-620.ZCD /
P-620.ZCL

P-621.ZCD /
P-621.ZCL

P-622.ZCD /
P-622.ZCL

Unit

Tolerance

Active axes

Z

Z

Z

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

65

140

400

µm

min. (20 % / -0 %)

Closed-loop travel

50

100

250

µm

Open-loop resolution

0.1

0.2

0.5

nm

typ.

Closed-loop resolution

0.2

0.3

1

nm

typ.

Linearity error

0.02

0.02

0.02

%

typ.

Repeatability

±1

±1

±1

nm

typ.

Runout θX, θY

<20

<20

<80

µrad

typ.

Mechanical properties

Stiffness

0.5

0.6

0.24

N/µm

±20 %

Unloaded resonant frequency

1000

790

360

Hz

±20 %

Resonant frequency @ 30 g

690

500

270

Hz

±20 %

Push / pull force capacity

10 / 5

10 / 8

10 / 8

N

max.

Load capacity

10

10

10

N

max.

Lateral force

10

10

10

N

max.

Drive properties

Ceramic type

PICMA® P-883

PICMA® P-885

PICMA® P-885

Electrical capacitance

0.7

3

6.2

µF

±20 %

Dynamic operating current coefficient

1.8

3.8

3.1

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Dimensions

30 mm × 30 mm × 15 mm

40 mm × 40 mm × 17.5 mm

50 mm × 50 mm × 17.5 mm

Mass

0.12

0.17

0.24

kg

±5 %

Cable length

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

CD versions: Sub-D special

CL versions: LEMO

Versions without sensor are available as P-62x.Z0L; operating temperature range -20 to 150 °C. Sensor / voltage connection LEMO.

Drawings / Images

PI P-62x.ZCD Drawing

Order Information

P-620.ZCDPrecise PIHera Vertical Nanopositioning Stage, 50 µm, Capacitive Sensor, Sub-D Connector(s)

P-620.ZCLPrecise PIHera Vertical Nanopositioning Stage, 50 µm, Capacitive Sensor, LEMO Connector(s)

P-620.Z0LPrecise PIHera Vertical Nanopositioning Stage, 65 µm, Open-Loop, LEMO Connector(s)

P-621.ZCDPrecise PIHera Vertical Nanopositioning Stage, 100 µm, Capacitive Sensor, Sub-D Connector(s)

P-621.ZCLPrecise PIHera Vertical Nanopositioning Stage, 100 µm, Capacitive Sensor, LEMO Connector(s)

P-621.Z0LPrecise PIHera Vertical Nanopositioning Stage, 140 µm, Open-Loop, LEMO Connector(s)

P-622.ZCDPrecise PIHera Vertical Nanopositioning Stage, 250 µm, Capacitive Sensor, Sub-D Connector(s)

P-622.ZCLPrecise PIHera Vertical Nanopositioning Stage, 250 µm, Capacitive Sensor, LEMO Connector(s)

P-622.Z0LPrecise PIHera Vertical Nanopositioning Stage, 400 µm, Open-Loop, LEMO Connector(s)

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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png PI Datasheet P-620.Z – P-622.Z
PIHera Precision Z-Stage variable Travel Ranges and Axis Configuration
PDF 920 K R1
fileadmin/images/filelist/pdf.png User Manual PZ234E
P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
PDF 1015 K 1.0.1 EN
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
PDF 984 K 3.0.0 DE / EN
fileadmin/images/filelist/zip.png P-62x.Z STEP
ZIP 327 K
fileadmin/images/filelist/zip.png PI Press Release P-620 PIHera
ZIP 991 K