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P-628KHFS Long-Travel XY Piezo Stage with Nanometer Flatness

Active Z-Axis Design Provides Real-Time Runout Compensation

PI P-628KHFS
    • Closed-loop travel range 800 µm × 800 µm (to 1500 µm possible)
    • Flatness of travel <1 nm
    • High-precision, cost-efficient
    • Resolution to 0.1 nm
    • Positioning accuracy 0.02 %
    • Frictionless, high-precision flexure guiding system
    • Outstanding lifetime due to PICMA® piezo actuators

Specifications

Travel ranges

Resonant frequency,
no load

Load capacity

Dimensions

P-628KHFS
high flatness XY stage

800 µm × 800 µm (X, Y)

75 Hz (X), 105 Hz (Y)

10 N

80 mm × 80 mm × (9.5 + 30) mm

Order Information

P-628KHFSLong-Range XY Nanopositioning System, 800 µm × 800 µm, PicoPlane High-Flatness Option

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