0543545searchresultspage5438384

P-630 High-Dynamics Nanopositioning System

1 Axis with Large Clear Aperture

PI P-630
    • Resonant frequency to 3.25 kHz
    • Travel ranges to 80 µm
    • Small footprint and low-profile height
    • Clear aperture with 30 mm diameter

Reference-class nanopositioning system

1 axis. Frictionless flexure-guided design, directly driven. Capacitive position sensor for maximum stability and linearity

PICMA® high-performance piezo drive

Piezoceramic actuators with all-ceramic insulation. Longer lifetime, humidity resistance and operating temperatures to 80 °C

Fields of application

Precision positioning of optical elements or objects in the optical path, for micromachining, microstructuring and scanning tasks in research and industry. Available as vacuum option

Specifications

P-630.XCD

P-631.XCD

Unit

Active axes

X

X

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

45

90

µm

Closed-loop travel

40

80

µm

Open-loop resolution

0.1

0.1

nm

Closed-loop resolution

0.2

0.2

nm

Closed-loop nonlinearity

0.02

0.02

%

Repeatability over the entire travel range

±2

±3

nm

Pitch / yaw

±5

±5

µrad

Straightness / flatness

50

50

nm

Mechanical properties

Stiffness in motion direction

5.5

5

N / µm

Unloaded resonant frequency

3250

2850

Hz

Resonant frequency @ 60 g

1600

1200

Hz

Push / pull force capacity in motion direction

10

10

N

Load capacity

10

10

N

Drive properties

Piezo ceramic

PICMA® P-887

PICMA® P-885; P-887

Electrical capacitance

6.4

12.6

µF

Dynamic operating current coefficient

20

20

µA / Hz × µm

Miscellaneous

Operating temperature range

0 to 40

0 to 40

°C

Material

Aluminum

Aluminum

Dimensions

102 mm × 50 mm × 18 mm

102 mm × 50 mm × 18 mm

Mass

300

320

g

Cable length

1.5

1.5

m

Sensor / voltage connection

Sub-D special connector (single-axis, capacitive)

Sub-D special connector (single-axis, capacitive)

Recommended controller / amplifier

E-709.CR cost-efficient digital controller

E-709.CHG digital controller for high dynamics and quick step-and-settle

E-753.1CD digital controller for high resolution and linearity

E-709.CR cost-efficient digital controller

E-709.CHG digital controller for high dynamics and quick step-and-settle

E-753.1CD digital controller for high resolution and linearity

Drawings / Images

PI P-630 Drawing PI P-630 Diagramm PI P-630 Diagramm

Order Information

P-630.XCDLinear Piezo Nanopositioning System with Large Aperture, 40 µm, Direct Metrology, Capacitive Sensor

P-631.XCDLinear Piezo Nanopositioning System with Large Aperture, 80 µm, Direct Metrology, Capacitive Sensor


Ask about custom designs!

was added to the shopping cart for price quotes. OK
Click on the order information of the product you would like to add to your shopping cart for price quotes. Shopping Cart Help
To complete your quotation request, click on the shopping cart icon in the top menu bar and fill out the form. Shopping Cart Help
OK

Controllers / Drivers / Amplifiers

Related Products

Downloads

fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 664 kB 2.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ247E
P-630, P-631 Piezo Nanopositioning Systems with Aperture and Capacitive Sensor
pdf 656 kB 1.0.0 EN