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P-713 XY Piezo Scanner

Cost-Effective OEM System with Low Profile

PI P-713.2SL
    • Ideal for pixel sub-stepping in image enhancement
    • Compact design: 45 mm × 45 mm × 6 mm with clear aperture
    • Very cost-effective design
    • Travel ranges to 20 µm × 20 µm
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy

Specifications

P-713.20L

P-713.2SL

Unit

Tolerance

Active axes

X, Y

X, Y

Motion and positioning

Integrated sensor

SGS

Open-loop travel, -20 to 120 V

20

20

µm

min. (20 % /
-0 %)

Closed-loop travel

15

µm

Open-loop resolution

0.1

0.1

nm

typ.

Closed-loop resolution

1

nm

typ.

Linearity error

0.3

%

typ.

Repeatability

<4

nm

typ.

Pitch

typ. ±1
max. ±5

typ. ±1
max. ±5

µrad

Yaw

typ. ±40
max. ±50

typ. ±40
max. ±50

µrad

Mechanical properties

Stiffness

0.8

0.8

N/µm

±20 %

Resonant frequency, no load

2250

2250

Hz

±20 %

Resonant frequency under load

1310 (20 g)
1020 (50 g)
460 (100 g)

1310 (20 g)
1020 (50 g)
460 (100 g)

Hz

±20 %

Push / pull force capacity in motion direction

5 / 5

5 / 5

N

max.

Load capacity

2

2

N

max.

Drive properties

Ceramic type

PICMA® P-882

PICMA® P-882

Electrical capacitance in X, Y

0.31

0.31

µF

±20 %

Dynamic operating current coefficient in X, Y

2.5

2.5

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Stainless steel, ferromagnetic

Stainless steel, ferromagnetic

Dimensions

45 mm × 45 mm × 6 mm

45 mm × 45 mm × 6 mm

Mass

0.1

0.1

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

LEMO

Voltage connection

LEMO

LEMO

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value is given noise equivalent motion with E-503 amplifier.
Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 10 µm at 100 Hz requires approximately 2.5 mA drive current.

Recommended controller / amplifier

Single-channel (1 per axis): E-610 servo-controller / amplifier, E-625 servo-controller, bench-top, E-621 controller module
Multi-channel: E-500 modular piezo controller system with E-503 amplifier module (three channels) or E-505 (1 per axis, high-power) and E-509 controller


Drawings / Images

PI P-713 Drawing PI P-713 Diagramm PI P-713 Diagramm

Order Information

P-713.20LLow-Profile OEM XY Nanoscanner, 20 µm × 20 µm, Open-Loop, LEMO Connector(s)

P-713.2SLLow-Profile OEM XY Nanoscanner, 15 µm × 15 µm, SGS Sensor, LEMO Connector(s)

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Controllers / Drivers / Amplifiers

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