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P-726 PIFOC® High-Load Objective Scanner

High-Dynamics Piezo Z Scanner for Heavy Objectives

PI P-726
    • High-dynamics positioning and scanning for large objectives
    • Resonant frequency 1120 Hz, 560 Hz with 210 g load
    • Typical Step-and-settle about 6 ms
    • Travel range 100 µm
    • Direct-metrology capacitive sensors for best linearity, stability and control dynamics
    • Resolution to 0.3 nm
    • Frictionless, high-precision flexure guiding system for better focus stability

Specifications

P-726.1CD

Tolerance

Active axes

Z

Motion and positioning

Integrated sensor

Capacitive, direct metrology

Closed-loop travel

100 µm

Closed-loop resolution

0.4 nm

typ.

Open-loop resolution

0.3 nm

typ.

Closed-loop linearity error

0.02 %

typ.

Repeatability

±3 nm

typ.

Angular runout θX, θY

±5 µrad

typ.

Crosstalk X, Y

50 nm

typ.

Mechanical properties

Stiffness in motion direction

3.4 N/µm

±20 %

Unloaded resonant frequency

1120 Hz

±20 %

Resonant frequency under load

560 Hz (210 g)

±20 %

Loaded resonant frequency

480 Hz (310 g)

±20 %

Push / pull force capacity in motion direction

100 / 50 N

max.

Load capacity

20 N

max.

Drive properties

Piezo ceramic type

PICMA® P-885

Electrical capacitance

6 µF

±20 %

Dynamic operating current coefficient

7.5 µA/(Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80°C

Material

Aluminum, steel

Dimensions

Diameter: 65 mm

Height: 50.7 mm

Objective diameter

M32

max.

Mass

575 g

±5 %

Cable length

1.5 m

±10 mm

Sensor / voltage connection

Sub-D Special

Recommended controller / amplifier

Single-channel digital controller: E-753 (bench-top)

Single-channel: E-625 servo controller, bench-top, E-665 powerful servo controller, bench-top

E-500 modular piezo controller system with E-505 high-power amplifier module and E-509 servo controller

Ask about custom designs!

Drawings / Images

PI P-726.1xxx Drawing PI P-726 Diagramm PI P-726

Order Information

P-726.1CDHigh-DynamicsPIFOC® Piezo Nanofocusing Z Drive, 100 µm, Capacitive Sensor

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Controllers / Drivers / Amplifiers

Downloads

fileadmin/images/filelist/zip.png P-726 STEP
zip 284 kB