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P-733.2 • P-733.3 XY(Z) Piezo Nanopositioning Stage

High-Precision XY(Z) Scanner Family with Aperture

PI P-733.2
    • Travel ranges to 100 µm × 100 µm in X,Y and to 10 µm in Z
    • Resolution to 0.1 nm with capacitive sensors
    • High-speed versions with direct drive
    • Vacuum-compatible and non-magnetic versions
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy
    • Parallel metrology for active trajectory control
    • Frictionless, high-precision flexure guiding system
    • Clear aperture 50 mm × 50 mm for transmitted-light applications

Specifications

P-733.2CD
P-733.2CL

P-733.3CD
P-733.3CL

P-733.2DD

P-733.3DD

Unit

Tolerance

Active axes

X, Y

X, Y, Z

X, Y

X, Y, Z

Motion and
positioning

Integrated
sensor

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop
travel,
-20 to 120 V

115 µm × 115 µm

115 µm × 115 µm × 12 µm

33 µm × 33 µm

33 µm × 33 µm × 14 µm

min. (20 % / -0 %)

Closed-loop
travel

100 µm × 100 µm

100 µm × 100 µm × 10 µm

30 µm × 30 µm

30 µm × 30 µm × 10 µm

 

Open-loop resolution

0.2

0.2 (0.1 in Z)

0.1

0.1

nm

typ.

Closed-loop resolution

0.3

0.3 (0.2 in Z)

0.1

0.1

nm

typ.

Linearity error
(X, Y)

0.03

0.03

0.03*

0.03*

%

typ.

Linearity
error (Z)

0.03

0.03*

%

typ.

Repeatability
(X, Y)

<2

<2

<2

<2

nm

typ.

Repeatability (Z)

<1

<1

nm

typ.

Pitch (X,Y)

<±3

<±3

<±5

<±5

µrad

typ.

Yaw (X, Y)

<±10

<±10

<±10

<±10

µrad

typ.

Runout θZ
(motion in Z)

<±5

<±5

µrad

typ.

Mechanical
properties

Stiffness

1.5

1.4 (9 in Z)

20

4 (10 in Z)

N/µm

±20 %

Unloaded
resonant
frequency

500

460 (1400 in Z)

2230

1200 (1100 in Z)

Hz

±20 %

Resonant
frequency
@ 120 g

370

340 (1060 in Z)

 –

Hz

±20 %

Resonant
frequency
@ 200 g

340

295 (650 in Z)

1550

530 (635 in Z)

Hz

±20 %

Push / pull
force capacity
in motion
direction

50 / 20

50 / 20

50 / 20

50 / 20

N

max.

Drive
properties

Piezo
ceramic

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

Electrical
capacitance

6

6 (2.4 in Z)

6.2

6.2 (3.3 in Z)

µF

±20 %

Dynamic
operating
current
coefficient

7.5

7.5 (30 in Z)

25

25 (41 in Z)

µA / (Hz × µm)

±20 %

Miscellaneous

 

 

 

 

Operating
temperature
range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Mass

0.58

0.675

0.58

0.675

kg

±5 %

Cable
length

1.5

1.5

1.5

1.5

m

±10 mm

Sensor /
voltage
connection

Sub-D Special
(CD version);

LEMO
(CL version)

Sub-D Special
(CD version);

LEMO
(CL version)

Sub-D Special

Sub-D Special

* With digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 % typ.

Drawings / Images

PI P-733.3 Drawing PI P-733.2 Drawing PI P-733.xDD Drawing

Order Information

With Direct Drive

P-733.2DDHigh-Dynamics High-Precision XY Nanopositioning System, 30 µm × 30 µm, Direct Drive, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-733.3DDHigh-Dynamics Precision XYZ Nanopositioning System, 30 µm × 30 µm × 10 µm, Direct Drive, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s) 

 

With Sub-D Connector

P-733.2CDHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-733.3CDPrecision XYZ Nanopositioning System, 100 µm × 100 µm × 10 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s) 

 

With LEMO Connector

P-733.2CLHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

Possible accessories

P-733.AP1Adapter Plate for Mounting of P-733 Piezo Stages on M-545 XY Microscope Stages

 

With LEMO Connector

P-733.3CLPrecision XYZ Nanopositioning System, 100 µm × 100 µm × 10 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s) 

 

Vacuum Versions

P-733.2VLHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s), Vacuum-Compatible to 10-6 hPa

P-733.2VDHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s), Vacuum-Compatible to 10-6 hPa

P-733.2UDHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, parallel metrology, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

Ask about custom designs!

 

 

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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ103E
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
PDF 858 K 1.0.0 EN
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
PDF 668 K 2.0.0 DE / EN
fileadmin/images/filelist/pdf.png PI Datasheet P-733.2 • P-733.3
XY(Z) Piezo Nanopositioning Stage High-Precision XY(Z) Scanner Family with Aperture
PDF 904 K
fileadmin/images/filelist/pdf.png Overview Microscopy Accessories
PI Microscopy Sample Holders and Adapter Plates for Microscope Stages
PDF 39 K
fileadmin/images/filelist/zip.png P-733 STEP
ZIP 1.9 M