0543545searchresultspage5438384

P-733.2 • P-733.3 XY(Z) Piezo Nanopositioning Stage

High-Precision XY(Z) Scanner Family with Aperture

PI P-733.2
    • Travel ranges to 100 µm × 100 µm in X,Y and to 10 µm in Z
    • Resolution to 0.1 nm with capacitive sensors
    • High-speed versions with direct drive
    • Vacuum-compatible and non-magnetic versions
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy
    • Parallel metrology for active trajectory control
    • Frictionless, high-precision flexure guiding system
    • Clear aperture 50 mm × 50 mm for transmitted-light applications

Specifications

P-733.2CDP-733.2CL

P-733.3CDP-733.3CL

P-733.2DD

P-733.3DD

Unit

Tolerance

Active axes

X, Y

X, Y, Z

X, Y

X, Y, Z

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

115 µm × 115 µm

115 µm × 115 µm × 12 µm

33 µm × 33 µm

33 µm × 33 µm × 14 µm

min. (20 % / -0 %)

Closed-loop travel

100 µm × 100 µm

100 µm × 100 µm × 10 µm

30 µm × 30 µm

30 µm × 30 µm × 10 µm

 

Open-loop resolution

0.2

0.2 (0.1 in Z)

0.1

0.1

nm

typ.

Closed-loop resolution

0.3

0.3 (0.2 in Z)

0.1

0.1

nm

typ.

Linearity error (X, Y)

0.03

0.03

0.03*

0.03*

%

typ.

Linearity error (Z)

0.03

0.03*

%

typ.

Repeatability (X, Y)

<2

<2

<2

<2

nm

typ.

Repeatability (Z)

<1

<1

nm

typ.

Pitch (X,Y)

<±3

<±3

<±5

<±5

µrad

typ.

Yaw (X, Y)

<±10

<±10

<±10

<±10

µrad

typ.

Runout θZ (motion in Z)

<±5

<±5

µrad

typ.

Mechanical properties

Stiffness

1.5

1.4 (9 in Z)

20

4 (10 in Z)

N/µm

±20 %

Unloaded resonant frequency

500

460 (1400 in Z)

2230

1200 (1100 in Z)

Hz

±20 %

Resonant frequency @ 120 g

370

340 (1060 in Z)

 –

Hz

±20 %

Resonant frequency @ 200 g

340

295 (650 in Z)

1550

530 (635 in Z)

Hz

±20 %

Push / pull force capacity in motion direction

50 / 20

50 / 20

50 / 20

50 / 20

N

max.

Drive properties

Piezo ceramic

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

6

6 (2.4 in Z)

6.2

6.2 (3.3 in Z)

µF

±20 %

Dynamic operating current coefficient

7.5

7.5 (30 in Z)

25

25 (41 in Z)

µA / (Hz × µm)

±20 %

Miscellaneous

 

 

 

 

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Mass

0.58

0.675

0.58

0.675

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

Sub-D Special (CD version);

LEMO (CL version)

Sub-D Special (CD version);

LEMO (CL version)

Sub-D Special

Sub-D Special

* With digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 % typ.

Drawings / Images

PI P-733.3 Drawing PI P-733.2 Drawing PI P-733.xDD Drawing

Order Information

With Direct Drive

P-733.2DDHigh-Dynamics High-Precision XY Nanopositioning System, 30 µm × 30 µm, Direct Drive, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-733.3DDHigh-Dynamics Precision XYZ Nanopositioning System, 30 µm × 30 µm × 10 µm, Direct Drive, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s) 

 

With Sub-D Connector

P-733.2CDHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-733.3CDPrecision XYZ Nanopositioning System, 100 µm × 100 µm × 10 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s) 

 

With LEMO Connector

P-733.2CLHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

Possible accessories

P-733.AP1Adapter Plate for Mounting of P-733 Piezo Stages on M-545 XY Microscope Stages

 

With LEMO Connector

P-733.3CLPrecision XYZ Nanopositioning System, 100 µm × 100 µm × 10 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s) 

 

Vacuum Versions

P-733.2VLHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s), Vacuum-Compatible to 10-6 hPa

P-733.2VDHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s), Vacuum-Compatible to 10-6 hPa

P-733.2UDHigh-Precision XY Nanopositioning System, 100 µm × 100 µm, Capacitive Sensors, parallel metrology, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

Ask about custom designs!

 

 

was added to the shopping cart for price quotes. OK
Click on the order information of the product you would like to add to your shopping cart for price quotes. Shopping Cart Help
To complete your quotation request, click on the shopping cart icon in the top menu bar and fill out the form. Shopping Cart Help
OK

Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/zip.png P-733 STEP
zip 1.9 MB
fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 664 kB 2.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ103E
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
pdf 0.9 MB 1.0.0 EN
fileadmin/images/filelist/pdf.png Overview Microscopy Accessories
PI Microscopy Sample Holders and Adapter Plates for Microscope Stages
pdf 39 kB