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P-734 XY Piezo Scanner

High-Dynamics System with Minimum Runout and Clear Aperture

PI P-734.2CL
    • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
    • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
    • Travel range 100 µm × 100 µm
    • Clear aperture 56 mm × 56 mm
    • Capacitive sensors for resolution <0.4 nm
    • Outstanding lifetime due to PICMA® piezo actuators

Specifications

P-734.2CL

P-734.2CD

Unit

Tolerance

Active axes

X, Y

X, Y

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

110 µm × 110 µm

110 µm × 110 µm

min. (20 % /
-0 %)

Closed-loop travel

100 µm × 100 µm

100 µm × 100 µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

0.3

0.3

nm

typ.

Linearity error

0.03

0.03

%

typ.

Repeatability

<2.5

<2.5

nm

typ.

Pitch

<3

<3

µrad

typ.

Yaw

<10

<10

µrad

typ.

Flatness

typ. <5
max. 10

typ. <5
max. 10

nm

Mechanical properties

Stiffness

3

3

N/µm

±20 %

Resonant frequency, no load

500

500

Hz

±20 %

Resonant frequency at 200 g

350

350

Hz

±20 %

Resonant frequency at 500 g

250

250

Hz

±20 %

Push / pull force capacity in motion direction

300 / 100

300 / 100

N

max.

Load capacity

20

20

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

6.2

6.2

µF

±20 %

Dynamic operating current coefficient

7.8

7.8

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Mass (with cables)

1.04

1.04

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

2 × LEMO

Sub-D Special

Voltage connection

4 × LEMO

Sub-D Special

Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 10 µm at 10 Hz requires approximately 7.8 mA drive current.

Recommended controller / amplifier

P-734.2CL: E-500 modular piezo controller system with E-503 amplifier module (multi-channel) or E-505 (1 per axis, high performance) and E-509 controller
P-734.2CD: Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board

Drawings / Images

PI P-734 Drawing PI P-734 Diagramm

Order Information

P-734.2CDHigh-Precision XY Nanopositioning System with Minimum Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector(s)

P-734.2CLHigh-Precision XY Nanopositioning System with Minimum Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector(s)

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Controllers / Drivers / Amplifiers

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Downloads

fileadmin/images/filelist/pdf.png Kurzanleitung / Short Instructions PZ240EKDK
P-5xx, P-6xx, P-7xx Piezopositioniersysteme / Piezo Positioning Systems
pdf 708 kB 1.0.0 DE / EN
fileadmin/images/filelist/pdf.png User Manual PZ103E
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
pdf 0.9 MB 1.0.0 EN