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P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

PI P-750
    • 1 nm lateral guiding accuracy
    • Frictionless, high-precision flexure guiding system
    • Load capacity to 10 kg
    • Resolution <1 nm
    • Direct metrology with capacitive sensors for highest precision
    • Direct drive for Fast response
    • Travel range 75 µm
    • Outstanding lifetime due to PICMA® piezo actuators

Specifications

Closed-loop / open-
loop travel

Closed-loop / open-
loop resolution

Load capacity

Tilt ΘX, ΘY

Resonant frequency
(no load)

P-750.00

– / 75 µm

– / 0.4 nm

100 N

±10 µrad

600 Hz

P-750.20
with capacitive sensor

75 µm / 75 µm

1 nm / 0.4 nm

100 N

±10 µrad

600 Hz

* Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 3.8 mA drive current.
** Resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

Drawings / Images

PI P-750 Drawing

Order Information

P-750.00High-Load Nanopositioning System, 75 µm Travel Range

P-750.20High-Load Nanopositioning System, 75 µm Travel Range, Capacitive Sensor, Direct Metrology


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Controllers / Drivers / Amplifiers

Related Products

Downloads

fileadmin/images/filelist/pdf.png PI Datasheet P-750
Piezo Nanopositioning System High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology
PDF 731 K