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P-752 High Precision Nanopositioning Stage

High-Dynamics, Very Stable Piezo Scanner with Extreme Guiding Accuracy

PI P-752
    • Resolution 0.1 nm
    • Rapid response
    • Travel range to 35 µm
    • Highest linearity and stability with capacitive sensors
    • Flexure Guidance for Frictionless, Ultra-Straight Motion
    • Outstanding lifetime due to PICMA® piezo actuators

Specifications

P-752.11C

P-752.1CD

P-752.21C

P-752.2CD

Units

Tolerance

Active axes

X

X

X

X

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel, -20 to +120 V

20

20

35

35

µm

min. (20 % / -0 %)

Closed-loop travel

15

15

30

30

µm

Closed-loop / open-loop resolution

0.1

0.1

0.2

0.2

nm

typ.

Closed-loop linearity error

0.03

0.03

0.03

0.03

%

typ.

Repeatability

±1

±1

±2

±2

nm

typ., full travel

Pitch / yaw

±1

±1

±1

±1

µrad

typ.

Mechanical properties

Stiffness in motion direction

30

30

20

20

N/µm

±20 %

Unloaded resonant frequency

3200

3200

2100

2100

Hz

±20 %

Resonant frequency @ 300 g

980

980

600

600

Hz

±20 %

Push / pull force capacity in motion direction

100 / 10

100 / 10

100 / 10

100 / 10

N

max.

Load capacity

30

30

30

30

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

2.1

2.1

3.7

3.7

µF

±20 %

Dynamic operating current coefficient

17

17

15

15

µA/(Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Steel

Steel

Steel

Steel

Dimensions

66 mm × 40 mm × 13.5 mm

66 mm × 40 mm × 13.5 mm

84 mm × 40 mm × 13.5 mm

84 mm × 40 mm × 13.5 mm

Mass

0.25

0.25

0.35

0.35

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

LEMO

Sub-D Special

LEMO

Sub-D Special

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-503 amplifier

Recommended controller / amplifier

LEMO connector: E-500 piezo controller system with E-505 high-power amplifier and E-509 servo module
Sub-D special connector: E-610 servo controller / amplifier; E-625 servo controller, bench-top; E-665 high-power display controller, bench-top; E-753 digital controller

Ask about custom designs!

Drawings / Images

PI P-752.2xx Drawing PI P-752.1xx Drawing PI P-752.11C Diagramm PI P-752.11C Diagramm

Order Information

P-752.11CHigh-Dynamics Piezo Nanopositioning System, 15 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-752.1CDHigh-Dynamics Piezo Nanopositioning System, 15 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-752.21CHigh-Dynamics Piezo Nanopositioning System, 30 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-752.2CDHigh-Dynamics Piezo Nanopositioning System, 30 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)


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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png PI Datasheet P-752
High Precision Nanopositioning Stage High-Dynamics, Very Stable Piezo Scanner with Extreme Guiding Accuracy
PDF 917 K