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P-753 LISA Linear Actuator & Stage

High-Dynamics, Very Stable Piezo Nanopositioner

PI P-753.1CD
    • Versatile design: Flexure stage or actuator
    • Travel range to 38 µm
    • Resolution 0.05 nm
    • Direct-drive design for fastest response
    • Highest linearity and stability with capacitive sensors

Specifications

P-753.1CD

P-753.2CD

P-753.3CD

Unit

Tolerance

Active axes

X

X

X

Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Closed-loop travel

12

25

38

µm

Closed-loop / open-loop resolution

0.05

0.1

0.2

nm

typ., full travel

Linearity error, closed-loop

0.03

0.03

0.03

%

typ.

Repeatability

±1

±2

±3

nm

typ.

Pitch / yaw

±5

±7

±10

µrad

typ.

Mechanical properties

Stiffness in motion direction

45

24

16

N/µm

±20 %

Unloaded resonant frequency

5.6

3.7

2.9

kHz

±20 %

Resonant frequency @ 200 g

2.5

1.7

1.4

kHz

±20 %

Push / pull force capacity in motion direction

100 / 20

100 / 20

100 / 20

N

max.

Load capacity (vertical / horizontal mounting)

10 / 2

10 / 2

10 / 2

kg

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

3.1

4.6

µF

±20 %

Dynamic operating current coefficient

12

15

15

µA / (Hz × µm)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

°C

Material

Steel

Steel

Steel

Dimensions

44 mm × 30 mm × 15 mm

62 mm × 30 mm × 15 mm

80 mm × 30 mm × 15 mm

Mass

0.16

0.215

0.26

kg

±5 %

Cable length

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

Sub-D Special

Sub-D Special

Sub-D Special

The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise-equivalent motion with the E-503 piezo amplifier module
Versions with LEMO connector available as P-753.x1C.
Vacuum-compatible versions to 10-9 hPa available as P-753.xUD.
Non-magnetic versions available as P-753.xND.

Ask about custom designs!

Drawings / Images

PI P-753.1 Drawing PI P-753.2 Drawing PI P-753.3 Drawing

Order Information

Versions with Sub-D connector

P-753.1CDLISA High-Dynamics Nanopositioning System, 12 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-753.2CDLISA High-Dynamics Nanopositioning System, 25 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

P-753.3CDLISA High-Dynamics Nanopositioning System, 38 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)

 

Versions with LEMO connector

P-753.11CLISA High-Dynamics Nanopositioning System, 12 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-753.21CLISA High-Dynamics Nanopositioning System, 25 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

P-753.31CLISA High-Dynamics Nanopositioning System, 38 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)

 

Vacuum versions

P-753.1UDLISA High-Dynamics Nanopositioning System, 12 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-753.2UDLISA High-Dynamics Nanopositioning System, 25 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa

P-753.3UDLISA High-Dynamics Nanopositioning System, 38 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa


Non-magnetic versions available as P-753.xND.

Ask about custom designs!

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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ254E
P-753 LISA High-Dynamics Piezo Nanopositioning Systems
PDF 925 K 1.0.0 EN
fileadmin/images/filelist/pdf.png PI Datasheet P-753
LISA Linear Actuator & Stage High-Dynamics, Very Stable Piezo Nanopositioner
PDF 846 K
fileadmin/images/filelist/zip.png P-753 STEP
ZIP 415 K