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P-763 Compact XY Nanopositioning System

With Clear Aperture

PI P-763
    • Travel range 200 µm
    • High positional stability and resolution with capacitive sensors
    • Small footprint with a 70 mm side length
    • Large clear aperture 30 mm × 30 mm

Precision-class nanopositioning system

2 axes, serial kinematics. Frictionless flexure joints with mechanical lever motion amplifiers. Capacitive position sensors for maximum stability and linearity

PICMA® high-performance piezo drive

Piezoceramic actuators with all-ceramic insulation. Longer lifetime, humidity resistance and operating temperatures to 80 °C

Fields of application

Sample handling and positioning in research and industry, also suitable for transmitted-light applications

Specifications

Preliminary data

P-763.22C

Unit

Active axes

X, Y

Motion and positioning

Integrated sensor

Capacitive sensors

Closed-loop travel in X, Y

200

µm

Open-loop resolution in X, Y

1

nm

Closed-loop resolution in X, Y

2

nm

Linearity error in X, Y

0.02

%

Repeatability X, Y

±5

nm

Mechanical properties

Loaded resonant frequency in X

180 Hz (260 g)

Hz

Load capacity

10

N

Drive properties

Piezoceramics

PICMA® P-887

Electrical capacitance in X , Y

12.8

µF

Miscellaneous

Operating temperature range

-20 to 80

°C

Material

Aluminum, steel

Dimensions

70 mm × 70 mm × 25 mm

Clear Aperture

30 mm × 30 mm

Cable length

1.5

m

Connection

1× Sub-D Mix, 1 channel, for X and Y respectively

Recommended controller

2× E-709.CRG or 2× E-709.CHG (for high dynamics);

E-725 (plug adapter required)

Drawings / Images

PI P-763 Drawing

Order Information

P-763.22CXY Nanopositioning System with Small Footprint and Large Aperture, 200 µm × 200 µm, Direct Metrology, Capacitive Sensors


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Controllers / Drivers / Amplifiers

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ258E
P-763.22C XY Nanopositioning System with Small Footprint and Large Aperture
pdf 733 kB 1.0.0 EN