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P-915KLVS Vacuum Compatible XYZ Piezo Scanner

Large Clear Aperture, High-Dynamics, High-Load Nanopositioner

PI P-915KLVS
    • Vacuum-compatible to 10-6 hPa
    • Direct metrology with capacitive sensors
    • Excellent straightness: <0.1 µrad runout
    • Frictionless, high-precision flexure guiding system

Specifications

Travel

Resolution

Resonant frequency

Load capacity

Dimensions

P-915KLVS
Large XYZ Scanner

100 µm × 100 µm × 100 µm

1 nm

110 Hz (X, Y)

230 Hz (Z)

50 kg

340 mm × 340 mm × 60 mm

Clear aperture 200 mm × 200 mm

Order Information

P-915KLVSXYZ Nanopositioning System with Large Clear Aperture, 100 µm × 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Vacuum Compatible to 10-6 hPa

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